公开(公告)号：US20050002084A1

公开(公告)日：2005-01-06

申请号：US10142821

申请日：2002-05-09

Applicant: Chang Wan

Inventor： Chang Wan

IPC: B81B3/00 ,  B81B7/02 ,  G02B26/08 ,  G02B26/00

CPC classification number: G02B26/0841 ,  B81B3/0035 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/058

Abstract: The present invention is related to a novel micro-electro-mechanical systems (MEMS) torsional drive that is capable of tilting suspended structure such as a micro-mirror for steering light beams in three-dimensional analog fashion, which is suitable for high port count optical switches. The torsional drive has the advantages of allowing large tilt angle, having low drive voltage, and capable of providing a feedback signal for closed-loop control.

Abstract translation: 本发明涉及一种新颖的微电机械系统（MEMS）扭转驱动器，其能够倾斜诸如用于以三维模拟方式转向光束的微镜等悬置结构，适用于高端口数 光开关。 扭转驱动器具有允许具有低驱动电压的大倾斜角度并且能够提供用于闭环控制的反馈信号的优点。