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公开(公告)号：US08736812B2
公开(公告)日：2014-05-27
申请号：US13375102
申请日：2011-08-16
申请人： Changqing Xie , Nan Gao , Yilei Hua , Xiaoli Zhu , Hailiang Li , Lina Shi , Dongmei Li , Ming Liu
发明人： Changqing Xie , Nan Gao , Yilei Hua , Xiaoli Zhu , Hailiang Li , Lina Shi , Dongmei Li , Ming Liu
IPC分类号： G03B27/42
CPC分类号： G02B5/1876 , G03F7/70316 , G03F7/70325
摘要： The present disclosure relates to the field of micro-nano fabrication, and provides a projection-type photolithography system using a composite photon sieve. The system comprises: a lighting system, a mask plate, a composite photon sieve and a substrate, which are arranged in order. The lighting system is adapted to generate incident light and irradiate the mask plate with the incident light. The mask plate is adapted to provide an object to be imaged by the composite photon sieve, and the incident light reaches the composite photon sieve after passing through the mask plate. The composite photon sieve is adapted to perform imaging, by which a pattern on the mask plate is imaged on the substrate. The substrate is adapted to receive an image of the pattern on the mask plate imaged by the composite photon sieve. According to the present disclosure, because the composite photon sieve is used instead of a projection objective lens in a conventional projection-type photolithography system, the advantage of high efficiency in the conventional projection-type photolithography system can be reserved, and also photolithography can be performed in batches rapidly, so that photolithography efficiency can be improved. Meanwhile, costs can be effectively cut down and the system can be reduced in size.
摘要翻译： 本公开涉及微纳米制造领域，并且提供了使用复合光子筛的投影型光刻系统。 该系统包括：依次布置的照明系统，面板，复合光子筛和基板。 照明系统适于产生入射光并用入射光照射掩模板。 掩模板适于通过复合光子筛提供要成像的物体，并且入射光通过掩模板后到达复合光子筛。 复合光子筛适于进行成像，掩模板上的图案在基底上成像。 衬底适于接收由复合光子筛成像的掩模板上的图案的图像。 根据本公开，由于在常规投影型光刻系统中使用复合光子筛代替投影物镜，因此可以预留在常规投影型光刻系统中高效率的优点，并且光刻可以 批量快速进行，从而可以提高光刻效率。 同时，可以有效降低成本，缩小系统。
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公开(公告)号：US20130044299A1
公开(公告)日：2013-02-21
申请号：US13375102
申请日：2011-08-16
申请人： Changqing Xie , Nan Gao , Yilei Hua , Xiaoli Zhu , Hailiang Li , Lina Shi , Dongmei Li , Ming Liu
发明人： Changqing Xie , Nan Gao , Yilei Hua , Xiaoli Zhu , Hailiang Li , Lina Shi , Dongmei Li , Ming Liu
IPC分类号： G03B27/32
CPC分类号： G02B5/1876 , G03F7/70316 , G03F7/70325
摘要： The present disclosure relates to the field of micro-nano fabrication, and provides a projection-type photolithography system using a composite photon sieve. The system comprises: a lighting system, a mask plate, a composite photon sieve and a substrate, which are arranged in order. The lighting system is adapted to generate incident light and irradiate the mask plate with the incident light. The mask plate is adapted to provide an object to be imaged by the composite photon sieve, and the incident light reaches the composite photon sieve after passing through the mask plate. The composite photon sieve is adapted to perform imaging, by which a pattern on the mask plate is imaged on the substrate. The substrate is adapted to receive an image of the pattern on the mask plate imaged by the composite photon sieve. According to the present disclosure, because the composite photon sieve is used instead of a projection objective lens in a conventional projection-type photolithography system, the advantage of high efficiency in the conventional projection-type photolithography system can be reserved, and also photolithography can be performed in batches rapidly, so that photolithography efficiency can be improved. Meanwhile, costs can be effectively cut down and the system can be reduced in size.
摘要翻译： 本公开涉及微纳米制造领域，并且提供了使用复合光子筛的投影型光刻系统。 该系统包括：依次布置的照明系统，面板，复合光子筛和基板。 照明系统适于产生入射光并用入射光照射掩模板。 掩模板适于通过复合光子筛提供要成像的物体，并且入射光通过掩模板后到达复合光子筛。 复合光子筛适于进行成像，掩模板上的图案在基底上成像。 衬底适于接收由复合光子筛成像的掩模板上的图案的图像。 根据本公开，由于在常规投影型光刻系统中使用复合光子筛代替投影物镜，因此可以预留在常规投影型光刻系统中高效率的优点，并且光刻可以 批量快速进行，从而可以提高光刻效率。 同时，可以有效降低成本，缩小系统。
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公开(公告)号：USD1024992S1
公开(公告)日：2024-04-30
申请号：US35516568
申请日：2023-02-21
申请人： Nan Gao
设计人： Qiubo Zheng , Nan Gao , Li Jian
摘要： 1. Night light
1.1 : Perspective
1.2 : Front
1.3 : Back
1.4 : Left
1.5 : Right
1.6 : Top
1.7 : Bottom-
公开(公告)号：US09582807B2
公开(公告)日：2017-02-28
申请号：US12390362
申请日：2009-02-20
CPC分类号： G06Q30/02 , G06Q10/10 , G06Q30/0245 , G06Q30/0251 , G06Q30/0277 , G06Q50/01
摘要： A social network advertises to its members with engagement interfaces. An engagement interface comprises a call to action and a link to perform the action within the social network from within the engagement interface. Responsive to a user selection of the link to perform the action, the engagement interface modifies one or more objects within the social network associated with the call to action according to the selection of the link to perform the action. The engagement interface may be refreshed on the user's screen to indicate to the user that the action has been performed. An engagement interface may also be presented to a user from the social network or from an external system apart from the social network.
摘要翻译： 社交网络通过参与界面向其会员宣传。 参与界面包括来电动作和链接，以在接合界面内在社交网络内执行动作。 响应于用户选择链接以执行动作，参与界面根据链接的选择来修改与呼叫对应关联的社交网络中的一个或多个对象以执行动作。 可以在用户的屏幕上刷新参与界面，以向用户指示已经执行了动作。 参与界面也可以从社交网络或从社交网络之外的外部系统呈现给用户。
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公开(公告)号：US20130013695A1
公开(公告)日：2013-01-10
申请号：US13620302
申请日：2012-09-14
IPC分类号： G06F15/16
CPC分类号： G06Q30/02 , G06Q10/10 , G06Q30/0245 , G06Q30/0251 , G06Q30/0277 , G06Q50/01
摘要： A social network advertises to its members with engagement interfaces. An engagement interface comprises a call to action and a link to perform the action within the social network from within the engagement interface. Responsive to a user selection of the link to perform the action, the engagement interface modifies one or more objects within the social network associated with the call to action according to the selection of the link to perform the action. The engagement interface may be refreshed on the user's screen to indicate to the user that the action has been performed. An engagement interface may also be presented to a user from the social network or from an external system apart from the social network.
摘要翻译： 社交网络通过参与界面向其会员宣传。 参与界面包括来电动作和链接，以在接合界面内在社交网络内执行动作。 响应于用户选择链接以执行动作，参与界面根据链接的选择来修改与呼叫对应关联的社交网络中的一个或多个对象以执行动作。 可以在用户的屏幕上刷新参与界面，以向用户指示已经执行了动作。 参与界面也可以从社交网络或从社交网络之外的外部系统呈现给用户。
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