公开(公告)号：US07658097B2

公开(公告)日：2010-02-09

申请号：US11537535

申请日：2006-09-29

申请人： Chanmin Su ,  Peter M. Lombrozo

发明人： Chanmin Su ,  Peter M. Lombrozo

IPC分类号： G01B5/28 ,  G01N13/16

CPC分类号： G01Q10/045 ,  G01Q10/04

摘要： A probe instrument having a probe that interacts with a sample surface to perform a mechanical property measurement at high speed includes a scanner producing relative motion between the sample and the probe. In addition, a probe actuator produces relative motion between the sample and the probe, in a generally vertical direction, and a controller that generates a scanner drive signal and an actuator drive signal. The probe actuator is responsive to the actuator drive signal and has an operable bandwidth of at least about 50-80 kHz to perform the fast force curve measurements. The probe actuator is preferably located at least partially on the cantilever. Moreover, feedback during normal operation may be interrupted to perform a force curve measurement with the integrated actuator.

摘要翻译： 具有与样品表面相互作用以便高速进行机械性能测量的探针的探针仪器包括产生样品和探针之间的相对运动的扫描器。 此外，探针致动器在大致垂直的方向上产生样品和探针之间的相对运动，以及产生扫描仪驱动信号和致动器驱动信号的控制器。 探头致动器响应于致动器驱动信号，并且具有至少约50-80kHz的可操作带宽以执行快速力曲线测量。 探针致动器优选地至少部分地位于悬臂上。 此外，正常操作期间的反馈可能被中断，以使用集成执行器执行力曲线测量。