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公开(公告)号:US12191226B2
公开(公告)日:2025-01-07
申请号:US18155322
申请日:2023-01-17
Applicant: MEDIATEK INC. , Chee-Wee Liu
Inventor: Ming-Tzong Yang , Hsien-Hsin Lin , Wen-Kai Wan , Chia-Che Chung , Chee-Wee Liu
IPC: H01L23/373 , H01L21/768 , H01L29/66 , H01L29/78
Abstract: A semiconductor device and method for forming same. According to an embodiment. The method provides a base substrate, forms a heat dissipation substrate on the base substrate, wherein a thermal conductivity of the heat dissipation substrate is between 200 Wm−1K−1 and 1200 Wm−1K−1. This method further forms a device layer on the heat dissipation substrate, wherein the device layer comprises a transistor. The method further removes the base substrate.
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公开(公告)号:US20220059429A1
公开(公告)日:2022-02-24
申请号:US17133896
申请日:2020-12-24
Applicant: Chee-Wee LIU , MEDIATEK INC.
Inventor: Ming-Tzong Yang , Hsien-Hsin Lin , Wen-Kai Wan , Chia-Che Chung , Chee-Wee Liu
IPC: H01L23/373 , H01L21/768 , H01L29/66 , H01L29/78
Abstract: A semiconductor device includes a heat dissipation substrate and a device layer. The thermal conductivity of the heat dissipation substrate is greater than 200 Wm−1K−1and the device layer is disposed on the heat dissipation substrate. The device layer includes a transistor.
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公开(公告)号:US11587846B2
公开(公告)日:2023-02-21
申请号:US17133896
申请日:2020-12-24
Applicant: MEDIATEK INC. , Chee-Wee Liu
Inventor: Ming-Tzong Yang , Hsien-Hsin Lin , Wen-Kai Wan , Chia-Che Chung , Chee-Wee Liu
IPC: H01L23/373 , H01L21/768 , H01L29/78 , H01L29/66
Abstract: A semiconductor device includes a heat dissipation substrate and a device layer. The thermal conductivity of the heat dissipation substrate is greater than 200 Wm−1K−1 and the device layer is disposed on the heat dissipation substrate. The device layer includes a transistor. A method of forming a semiconductor device includes providing a base substrate, forming a heat dissipation substrate on the base substrate, wherein a thermal conductivity of the heat dissipation substrate is greater than 200 Wm−1K−1. The method further includes forming a device layer on the heat dissipation substrate, wherein the device layer comprises a transistor. The method further includes removing the base substrate.
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