Abstract:
This invention utilizes the principle of time domain reflectometry (TDR) to develop an improved apparatus and method for suspended solid concentration (SSC) measurement. The apparatus comprises a TDR sensing waveguide for stably determining an electromagnetic-wave (EM-wave) travel time and a temperature sensor. The TDR sensing waveguide and the temperature sensor are submerged in a suspension to detect the EM-wave travel time and the temperature. A temperature-corrected relationship between EM-wave travel time and SSC is found and used to estimate the SSC. Although TDR has been used for measuring soil moisture content and high SSC, its accuracy is not satisfactory for typical SSC monitoring. The present invention improves the accuracy of TDR in SSC measurement by providing the apparatus and method disclosed herein, which are not affected by an electrical conductivity of the suspension and particle sizes of suspended solids therein, and therefore meet the requirements of general engineering applications and environmental monitoring.
Abstract:
A semiconductor device fabricating method is described. The semiconductor device fabricating method includes providing a substrate. A first gate insulating layer and a second gate insulating layer are formed on the substrate, respectively. A gate layer is blanketly formed. A portion of the gate layer, the first gate insulating layer and the second gate insulating layer are removed to form a first gate, a remaining first gate insulating layer, a second gate and a remaining second gate insulating layer. The remaining first gate insulating layer not covered by the first gate has a first thickness, and the remaining second gate insulating layer not covered by the second gate has a second thickness, wherein a ratio between the first thickness and the second thickness is about 10 to 20. A pair of first spacers and a pair of second spacers are formed on sidewalls of the first gate and the second gate, respectively.