Probe Card for Testing Semiconductor Devices and Vertical Probe Thereof
    1.
    发明申请
    Probe Card for Testing Semiconductor Devices and Vertical Probe Thereof 审中-公开
    用于测试半导体器件和垂直探针的探针卡

    公开(公告)号:US20120043987A1

    公开(公告)日:2012-02-23

    申请号:US12861183

    申请日:2010-08-23

    IPC分类号: G01R31/00

    CPC分类号: G01R1/06716

    摘要: A vertical probe for testing semiconductor devices includes a bottom contact and a top contact stacked on the bottom contact in a substantially linear manner. In one embodiment of the present invention, the bottom contact includes a plurality of first wave springs stacked one on top of another in a crest to crest manner, the bottom contact has a bottom opening configured to contact a device under test, and the wave spring is configured to provide a vertical displacement for relieving the stress generated as the vertical probe contacts the device under test, wherein the width of the top contact is greater than the width of the bottom contact.

    摘要翻译: 用于测试半导体器件的垂直探针包括以基本线性的方式堆叠在底部触点上的底部触点和顶部触点。 在本发明的一个实施例中,底部触点包括多个以峰顶方式堆叠在另一个顶部上的第一波形弹簧,底部触点具有被配置为接触被测器件的底部开口和波形弹簧 被配置为提供垂直位移,用于消除当垂直探针接触被测器件时产生的应力,其中顶部触点的宽度大于底部触点的宽度。

    Probe card for testing high-frequency signals
    2.
    发明授权
    Probe card for testing high-frequency signals 有权
    用于测试高频信号的探针卡

    公开(公告)号:US08692570B2

    公开(公告)日:2014-04-08

    申请号:US13105321

    申请日:2011-05-11

    IPC分类号: G01R31/00

    摘要: A probe card includes a circuit board, a flexible substrate, and a plurality of probes. The flexible substrate includes a plurality of arrayed conductive strips. The plurality of conductive strips is electrically connected to the printed circuit board. The plurality of probes is fixed to the printed circuit board, and the end of each probe is attached to one corresponding conductive strip.

    摘要翻译: 探针卡包括电路板,柔性基板和多个探针。 柔性基板包括多个排列的导电条。 多个导电带电连接到印刷电路板。 多个探针固定在印刷电路板上,每个探针的端部连接到一个对应的导电条上。