公开(公告)号：US20090073403A1

公开(公告)日：2009-03-19

申请号：US11902186

申请日：2007-09-19

申请人： Christianus Gerardus Maria DE MOL ,  Maria Elisabeth REUHMAN-HUISKEN

发明人： Christianus Gerardus Maria DE MOL ,  Maria Elisabeth REUHMAN-HUISKEN

IPC分类号： G06F17/50 ,  G03B27/42

CPC分类号： G03F9/7003 ,  G03F9/7034

摘要： A method of characterizing the similarity between entities in a set of entities, wherein an entity is selected from substrate layers, substrate fields and substrates. Including determining positions at a plurality of measurement points per entity for providing position data; computing a correlation coefficient for each of a plurality of combinations of entities from the entity set, the correlation coefficients being based on the position data and being representative of the correlation between the associated combination of entities; comparing the correlation coefficients to a threshold amount to determine the extent of similarity between the entities. The invention also relates to a similar method incorporating determining an average value of the computed correlation coefficients, the average value providing a measure of the consistency.

摘要翻译： 表征一组实体中的实体之间的相似性的方法，其中从衬底层，衬底场和衬底中选择实体。 包括在每个实体的多个测量点处确定位置以提供位置数据; 计算来自所述实体集合的多个实体组合中的每一个的相关系数，所述相关系数基于所述位置数据并且表示所述相关联的实体组合之间的相关性; 将相关系数与阈值进行比较，以确定实体之间的相似程度。 本发明还涉及一种包括确定所计算的相关系数的平均值的类似方法，该平均值提供一致性的量度。