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公开(公告)号:US09865461B2
公开(公告)日:2018-01-09
申请号:US14899435
申请日:2014-06-06
申请人: Christoph Mader , Paul Henrich Woebkenberg , Joachim Erz , Stephan Traut , Matthias Patz , Michael Coelle , Stephan Wieber , Patrik Stenner , Janette Klatt , Odo Wunnicke
发明人: Christoph Mader , Paul Henrich Woebkenberg , Joachim Erz , Stephan Traut , Matthias Patz , Michael Coelle , Stephan Wieber , Patrik Stenner , Janette Klatt , Odo Wunnicke
CPC分类号: H01L21/02628 , C23C18/1204 , H01L21/02532
摘要: The present invention relates to a liquid-phase process for producing structured silicon- and/or germanium-containing coatings by the application to a substrate of at least one coating composition, the partial activation of the resulting coating on the coated substrate, and oxidation of non-activated coating on the substrate, to the coats produced by the process and to their use.
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公开(公告)号:US10457813B2
公开(公告)日:2019-10-29
申请号:US14899388
申请日:2014-06-12
申请人: Paul Henrich Woebkenberg , Matthias Patz , Stephan Traut , Jutta Hessing , Miriam Deborah Malsch
发明人: Paul Henrich Woebkenberg , Matthias Patz , Stephan Traut , Jutta Hessing , Miriam Deborah Malsch
IPC分类号: C09D1/00 , C23C18/12 , C09D183/04 , H01L31/18 , C08G77/12
摘要: The present invention relates to formulations comprising at least one hydridosilane of the generic formula SinH2n+2 with n=3-6 and at least one hydridosilane oligomer, to processes for preparation thereof and to the use thereof.
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