摘要:
A CMUT or other semiconductor-based transducer is stacked with a piezoelectric transducer (PZT). The CMUT is sufficiently thin to avoid or limit interference with sound propagation through the CMUT from or to the PZT or crosstalk between transmitter elements. The PZT/CMUT layered structure is used as a matrix array, such as an array with a multi-dimensional arrangement of elements. The CMUT array is formed and thinned using semiconductor processing. The PZT transmits acoustic energy through the thin CMUT. The CMUT receives responsive echoes. Using integrated electronics in the thin wafer of the CMUT limits interconnection problems for the matrix receive array.
摘要:
An electrostatic transducer circuit and method of tuning the same, in which a balancing circuit is inserted into the electrostatic transducer circuit, is described. The electrostatic transducer circuit generally includes transmit circuitry, receive circuitry, a capacitive electrostatic transducer and the balancing circuit. The balancing circuit can include, either singly or in combination, an inductance and a negative capacitance. The balancing inductance is tuned to counteract the negative reactance of the capacitive electrostatic transducer at a desired operating frequency and can be inserted into the transmit circuitry and/or the receive circuitry. The balancing negative capacitance is tuned to counteract the capacitance of the capacitive electrostatic transducer and can be inserted into the receive circuitry and/or the transmit circuitry. The transmit circuitry can be isolated from the receive circuitry, and vice versa, once the balancing circuit has been inserted. Isolation can be achieved by switching the electrostatic transducer circuit between transmit and receive modes of operation, or by providing separate transmit and receive electrode subsets.
摘要:
To generate information representing a volume, co-arrays or synthetic transmit aperture process is performed in one dimension and beamforming is performed in another dimension. For example, a transmit aperture focuses in azimuth, but is unfocused or divergent in elevation. A multi-dimensional array receives reflected echoes. The echoes are beamformed for sub-arrays for focus in azimuth. The resulting partial beamformed information is provided to an imaging system from the probe housing for completion of beamforming at least in elevation.
摘要:
A capacitive microfabricated ultrasonic transducer with control of elevation phase through alternating bias polarity is disclosed. Such control of elevation phase results in simple ultrasonic probes with excellent slice thickness attributes. Furthermore, tight spatial variation of phase results in an effective way to achieve transmit aperture and apodization control. Further still, such capacitive microfabricated ultrasonic transducers can achieve elevation focus without the need of a lossy mechanical lens.
摘要:
A CMUT or other semiconductor-based transducer is stacked with a piezoelectric transducer (PZT). The CMUT is sufficiently thin to avoid or limit interference with sound propagation through the CMUT from or to the PZT or crosstalk between transmitter elements. The PZT/CMUT layered structure is used as a matrix array, such as an array with a multi-dimensional arrangement of elements. The CMUT array is formed and thinned using semiconductor processing. The PZT transmits acoustic energy through the thin CMUT. The CMUT receives responsive echoes. Using integrated electronics in the thin wafer of the CMUT limits interconnection problems for the matrix receive array.
摘要:
In a capacitive membrane ultrasound transducer, one or more electrodes include multiple layers of conductive or semiconductive material. The layers may be positioned adjacent an insulator or cavity in an arrangement to reduce electrical degradation. For example, a conductive layer with less work function and less resistivity is spaced from an insulator by a conductive layer with more work function and more resistivity. The different layers of electrode material may provide for less electrical degradation due to the type of material used and relative location.
摘要:
An ultrasound imaging system may use a capacitive membrane or electrostrictive ultrasound transducer to realize isotropic volumetric imaging with bias-line element selection and a variety of aperture synthesis techniques. Two dimensional beam formation may be performed by using a beamformer to focus along one dimension, and then perform a second round of “off-line” or “retrospective” beam formation along the other direction.
摘要:
A one-dimensional array is used for transmit operation, allowing connection with an imaging system for planar scanning and avoiding transmit electronics in the transducer array. A multi-dimensional array is used for reception only, avoiding transmit interconnects while providing greater coherence in elevation. Both arrays are moved to scan different planes, allowing acquisition of data representing a volume. This transducer arrangement may be used for scanning breasts for cancer screening.
摘要:
In a capacitive membrane ultrasound transducer, one or more electrodes include multiple layers of conductive or semiconductive material. The layers may be positioned adjacent an insulator or cavity in an arrangement to reduce electrical degradation. For example, a conductive layer with less work function and less resistivity is spaced from an insulator by a conductive layer with more work function and more resistivity. The different layers of electrode material may provide for less electrical degradation due to the type of material used and relative location.
摘要:
The present invention provides a microfabricated acoustic transducer with suppressed substrate modes. The modes are suppressed by either thinning the substrate such that a longitudinal ringing mode occurs outside of the frequency band of interest or by applying a judiciously designed damping material on the backside of the transducer substrate.