公开(公告)号：US20180308692A1

公开(公告)日：2018-10-25

申请号：US15962445

申请日：2018-04-25

申请人： Christopher Muratore ,  Michael E. McConney ,  Travis E. Shelton ,  Nicholas R. Glavin ,  John E. Bultman ,  Andrey A. Voevodin

发明人： Christopher Muratore ,  Michael E. McConney ,  Travis E. Shelton ,  Nicholas R. Glavin ,  John E. Bultman ,  Andrey A. Voevodin

IPC分类号： H01L21/02 ,  H01L29/24

CPC分类号： H01L21/02675 ,  H01L21/02422 ,  H01L21/02568 ,  H01L21/02631 ,  H01L29/24

摘要： Methods of making molybdenum sulfide (MoS2) on a stretchable substrate are disclosed. The method includes magnetron sputtering MoS2 onto a stretchable substrate, such as a stretchable polymeric material, at low temperatures to form a film precursor, and illumination annealing the film precursor to form high quality MoS2. The illumination source may be a laser or other source of radiation. Also, two-dimensional nanoelectronic devices made by the methods and/or from the high quality MoS2 are disclosed.

公开(公告)号：US20230369046A1

公开(公告)日：2023-11-16

申请号：US18225994

申请日：2023-07-25

申请人： Christopher Muratore ,  Michael E. McConney ,  Travis E. Shelton ,  Nicholas R. Glavin ,  John E. Bultman ,  Andrey A. Voevodin

发明人： Christopher Muratore ,  Michael E. McConney ,  Travis E. Shelton ,  Nicholas R. Glavin ,  John E. Bultman ,  Andrey A. Voevodin

IPC分类号： H01L21/02 ,  H01L29/24

CPC分类号： H01L21/02675 ,  H01L29/24 ,  H01L21/02631 ,  H01L21/02422 ,  H01L21/02568 ,  H01L21/02485

摘要： Methods of making molybdenum sulfide (MoS2) on a stretchable substrate are disclosed. The method includes magnetron sputtering MoS2 onto a stretchable substrate, such as a stretchable polymeric material, at low temperatures to form a film precursor, and illumination annealing the film precursor to form high quality MoS2. The illumination source may be a laser or other source of radiation. Also, two-dimensional nanoelectronic devices made by the methods and/or from the high quality MoS2 are disclosed.

公开(公告)号：US20200090933A1

公开(公告)日：2020-03-19

申请号：US16527326

申请日：2019-07-31

申请人： Christopher Muratore ,  Michael E. McConney ,  Travis E. Shelton ,  Nicholas R. Glavin ,  John E. Bultman ,  Andrey A. Voevodin

发明人： Christopher Muratore ,  Michael E. McConney ,  Travis E. Shelton ,  Nicholas R. Glavin ,  John E. Bultman ,  Andrey A. Voevodin

IPC分类号： H01L21/02 ,  H01L29/24

摘要： Methods of making molybdenum sulfide (MoS2) on a stretchable substrate are disclosed. The method includes magnetron sputtering MoS2 onto a stretchable substrate, such as a stretchable polymeric material, at low temperatures to form a film precursor, and illumination annealing the film precursor to form high quality MoS2. The illumination source may be a laser or other source of radiation. Also, two-dimensional nanoelectronic devices made by the methods and/or from the high quality MoS2 are disclosed.