公开(公告)号：US5863334A

公开(公告)日：1999-01-26

申请号：US882134

申请日：1997-06-25

申请人： Chu-An Chou ,  Ching-Shou Lee ,  Nai-Yuan Cheng

发明人： Chu-An Chou ,  Ching-Shou Lee ,  Nai-Yuan Cheng

IPC分类号： C03B20/00 ,  C30B31/14 ,  H01L21/22 ,  H01L21/673 ,  H01L21/683 ,  C23C16/00

CPC分类号： H01L21/67313 ,  C30B31/14

摘要： A strength-enhanced quartz boat is provided to enhance the strength at connections between the quartz plates and quartz rods of the quartz boat. The strength-enhanced quartz boat includes a front quartz plate, a rear quartz plate, a first pair of quartz rods, a second pair of quartz rods and four reinforcement bars. The first pair of quartz rods are disposed longitudinally to connect the front quartz plate and rear quartz plate at an upper location respectively. The second pair of quartz rods are disposed longitudinally to connect, via first engagement connections, the front quartz plate and rear quartz plate at a lower location respectively. Each reinforcement bar is disposed longitudinally to connect, via a second engagement connection, to one corresponding front quartz plate or rear quartz plate at a location below one corresponding rod of the lower pair of quartz rods. A welding operation is performed on the first engagement connections and the second engagement connections respectively. The welding operation is further performed on a junction between each reinforcement bar and one corresponding rod of the second pair of quartz rods.

摘要翻译： 提供强度增强的石英舟，以提高石英舟石英板和石英棒之间连接处的强度。 强度增强的石英舟包括前石英板，后石英板，第一对石英棒，第二对石英棒和四根钢筋。 第一对石英棒纵向设置以分别在上部位置连接前石英板和后石英板。 第二对石英棒纵向设置，通过第一接合连接分别在较低位置连接前石英板和后石英板。 每个加强筋纵向设置，以通过第二接合连接件在下一对石英棒的一个对应的杆下方的位置处连接到一个对应的前石英板或后石英板。 在第一接合连接和第二接合连接上分别执行焊接操作。 焊接操作进一步在每个钢筋与第二对石英棒的一个对应杆之间的连接处进行。