公开(公告)号：US20240241332A1

公开(公告)日：2024-07-18

申请号：US18155300

申请日：2023-01-17

Applicant: Cisco Technology, Inc.

Inventor： Long Chen ,  Qianfan Xu ,  Li Chen ,  Mark A. Webster

IPC: G02B6/42

CPC classification number: G02B6/4277

Abstract: A device and a method of fabricating the device are provided. The device includes an optical modulator formed in a dielectric material, a silicon substrate adjacent the dielectric material, and a metal shield formed in the dielectric material between the optical modulator and the silicon substrate. The metal shield blocks an electromagnetic field of a driving signal of the optical modulator from extending into the silicon substrate.