公开(公告)号：US20050226764A1

公开(公告)日：2005-10-13

申请号：US10519888

申请日：2003-06-25

申请人： Claude Moirandat ,  Volker Sigwarth

发明人： Claude Moirandat ,  Volker Sigwarth

IPC分类号： A61L2/20 ,  A61L2/24

CPC分类号： A61L2/208 ,  A61L2/24 ,  A61L2202/21 ,  A61L2202/24

摘要： A system for decontaminating a clean-room has an H2O2 supply device for supplying the clean-room with H2O2 and an H2O2 breakdown device for effecting a chemical breakdown of H2O2 without catalyst in the clean-room. The H2O2 breakdown device comprises a supply vessel filled with gaseous agent which can be introduced via a gas line into the clean-room where it reacts with the H2O2. A valve is placed in the gas line with which the amount of the gaseous agent introduced into the clean-room can be introduced under open-loop or closed-loop control. Owing to the fact that the excess H2O2, that is to say the H2O2 which has not reacted with other materials in the clean-room during the decontamination is broken down in the clean-room itself, it need not be flushed out completely from the clean-room first and broken down afterwards.

摘要翻译： 用于净化洁净室的系统具有用于向洁净室供应H 2 O 2 O 2的供应装置， 2和2 H 2 O 2分解装置，用于实现H 2 O 2 O 2的化学击穿 没有催化剂在洁净室。 H 2 O 2分解装置包括填充有气态试剂的供应容器，其可经由气体管线引入到清洁室中，其中其与H _{2 2 。 将阀门放置在气体管线中，通过该气体管道可以在开环或闭环控制下引入引入清洁室的气体剂量。 由于过量的H 2 O 2 O 2，也就是说H 2 O 2 O 2，其中 在洁净室本身没有清洁的情况下，在清洁室中没有与其他材料反应，不需要先从洁净室中彻底冲洗出来，然后再分解。}