公开(公告)号：US11810789B2

公开(公告)日：2023-11-07

申请号：US16709993

申请日：2019-12-11

申请人： Commissariat A L'Energie Atomique et aux Energies Alternatives

发明人： Shay Reboh ,  Victor Boureau ,  Sylvain Maitrejean ,  Francois Andrieu

IPC分类号： H01L21/308 ,  H01L21/02 ,  H01L21/8234

CPC分类号： H01L21/3083 ,  H01L21/0245 ,  H01L21/02249 ,  H01L21/3081 ,  H01L21/8234

摘要： A method for producing a semiconductor substrate is provided, including: producing a superficial layer arranged on a buried dielectric layer and including a strained semiconductor region; producing an etching mask on the superficial layer, covering a part of the region; etching the superficial layer to a pattern of the mask, exposing a first lateral edge of a first strained semiconductor portion belonging to the part and contacting the dielectric layer; forming a mechanical barrier from a second portion of material belonging to the first portion, the second portion having a bottom surface contacting the dielectric layer and an upper surface contacting the mask, the barrier arranged against the part and bearing mechanically against the second portion, and removing the mask.

公开(公告)号：US10884379B2

公开(公告)日：2021-01-05

申请号：US16196365

申请日：2018-11-20

申请人： COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

发明人： Victor Boureau ,  David Cooper

IPC分类号： H01J37/22 ,  H01J37/26 ,  G03H5/00 ,  H01J37/295 ,  G03H1/04

摘要： Method for acquisition of at least one hologram of a sample by off-axis holography using a transmission electron microscope, the microscope comprising an electron beam source, at least one objective lens, a sample holder, at electron biprism and means of displacing the electron beam in precession mode upstream from the sample holder and a compensator of the precession downstream from the sample holder, said method comprising the activation of means of displacing the electron beam in precession mode and the compensator and acquisition of a hologram of said sample in precession mode.