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公开(公告)号:US20090025633A1
公开(公告)日:2009-01-29
申请号:US12216988
申请日:2008-07-14
CPC分类号: H01L21/6715
摘要: A small volume resist dispenser includes a suck-back capable pressure operated valve, connectable to a nozzle of a spin coater and to a controller output arranged to open and close the valve to control liquid supply to the spin-coater. The dispenser comprises a holder for a bottle and arranged to pressurize a fluid in the bottle by applying gas pressure. The dispenser is suitable for use with, for example, pre-filled resist sample bottles containing resist samples of 100 ml to 300 ml resist solution.
摘要翻译: 小体积抗蚀剂分配器包括可连接到旋涂机的喷嘴的可回吸的压力操作阀,以及布置成打开和关闭阀门以控制对旋涂机的液体供应的控制器输出。 分配器包括用于瓶子的保持器,并且布置成通过施加气体压力来加压瓶子中的流体。 分配器适用于例如含有100毫升至300毫升抗蚀剂溶液的抗蚀剂样品的预填充抗蚀剂样品瓶。