公开(公告)号：US08858815B2

公开(公告)日：2014-10-14

申请号：US13858643

申请日：2013-04-08

申请人： Cornell Research Foundation, Inc.

发明人： Harold G. Craighead ,  Jun Kameoka

IPC分类号： B44C1/22 ,  C03C15/00 ,  C03C25/68 ,  C23F1/00 ,  D01F6/66 ,  C23F17/00 ,  B82Y30/00 ,  D01D5/00 ,  D01F6/64

CPC分类号： C23F17/00 ,  B82Y30/00 ,  D01D5/0069 ,  D01F6/64 ,  D01F6/66 ,  Y10S977/856 ,  Y10S977/888 ,  Y10T428/24562

摘要： Nanofibers are formed using electrospray deposition from microfluidic source. The source is brought close to a surface, and scanned in one embodiment to form oriented or patterned fibers. In one embodiment, the surface has features, such as trenches on a silicon wafer. In further embodiments, the surface is rotated to form patterned nanofibers, such as polymer nanofibers. The nanofibers may be used as a mask to create features, and as a sacrificial layer to create nanochannels.

摘要翻译： 使用来自微流体源的电喷雾沉积形成纳米纤维。 将源靠近表面，并在一个实施例中扫描以形成定向或图案化的纤维。 在一个实施例中，表面具有诸如硅晶片上的沟槽的特征。 在另外的实施方案中，旋转表面以形成图案化的纳米纤维，例如聚合物纳米纤维。 纳米纤维可以用作掩模以产生特征，并且作为牺牲层来制造纳米通道。

公开(公告)号：US20130327742A1

公开(公告)日：2013-12-12

申请号：US13858643

申请日：2013-04-08

申请人： Cornell Research Foundation, Inc.

发明人： Harold G. Craighead ,  Jun Kameoka

IPC分类号： C23F17/00

CPC分类号： C23F17/00 ,  B82Y30/00 ,  D01D5/0069 ,  D01F6/64 ,  D01F6/66 ,  Y10S977/856 ,  Y10S977/888 ,  Y10T428/24562

摘要： Nanofibers are formed using electrospray deposition from microfluidic source. The source is brought close to a surface, and scanned in one embodiment to form oriented or patterned fibers. In one embodiment, the surface has features, such as trenches on a silicon wafer. In further embodiments, the surface is rotated to form patterned nanofibers, such as polymer nanofibers. The nanofibers may be used as a mask to create features, and as a sacrificial layer to create nanochannels.