公开(公告)号：US20150083898A1

公开(公告)日：2015-03-26

申请号：US14037817

申请日：2013-09-26

申请人： Cymer, Inc.

发明人： Vahan Senekerimyan ,  Martijn Wehrens

IPC分类号： H05G2/00

CPC分类号： H05G2/008 ,  H05G2/006

摘要： A method and apparatus for improved control of the trajectory and timing of droplets of target material in a laser produced plasma (LPP) extreme ultraviolet (EUV) light system is disclosed. A droplet illumination module generates two laser curtains for detecting the droplets. The first curtain is used for detecting the position of the droplets relative to a desired trajectory to the irradiation site so that the position of a droplet generator may be adjusted to direct the droplets to the irradiation site, as in the prior art. A droplet detection module detects each droplet as it passes through the second curtain, determines when the source laser should generate a pulse so that the pulse arrives at the irradiation site at the same time as the droplet, and sends a signal to the source laser to fire at the correct time.

摘要翻译： 公开了一种用于改善对激光产生的等离子体（UVP）极紫外（EUV）光系统中的目标材料液滴的轨迹和定时的控制的方法和装置。 液滴照明模块产生用于检测液滴的两个激光幕。 第一幕用于检测液滴相对于照射位置的期望轨迹的位置，使得可以调节液滴发生器的位置以将液滴引导到照射位置，如现有技术中那样。 液滴检测模块在通过第二帘幕时检测每个液滴，确定源激光器何时产生脉冲，使得脉冲在与液滴同时到达照射位置，并将信号发送到源激光器 在正确的时间点火。