公开(公告)号：US20150244342A1

公开(公告)日：2015-08-27

申请号：US14707293

申请日：2015-05-08

申请人： DAIHEN Corporation

发明人： Takashi SHIMOMOTO ,  Koji ITADANI ,  Masakatsu MITO

IPC分类号： H03H7/40

CPC分类号： H03H7/40

摘要： An impedance adjustment apparatus of the invention performs impedance matching using characteristic parameters, even where a high frequency power source of variable frequencies is used. The apparatus is applicable to a power supply system using a high frequency power source of variable frequencies. Characteristic parameters obtained by targeting a portion of combinations of position information (C) of a variable capacitor and output frequency information (F) of the power source are stored in a memory. A T-parameter acquisition unit acquires characteristic parameters corresponding to (Cnow, Fnow) at the current time. An output reflection coefficient calculation unit calculates a reflection coefficient of an output end. A target information specifying unit, based on the above information and a target input reflection coefficient, specifies target combination information in which a reflection coefficient of an output end approaches the target input reflection coefficient. Impedance matching is performed based on this information.

摘要翻译： 本发明的阻抗调整装置即使在使用可变频率的高频电源的情况下，也使用特性参数进行阻抗匹配。 该装置适用于使用可变频率的高频电源的电源系统。 通过将可变电容器的位置信息（C）和电源的输出频率信息（F）的组合的一部分定位获得的特征参数存储在存储器中。 T参数获取单元在当前时间获取对应于（Cnow，Fnow）的特征参数。 输出反射系数计算单元计算输出端的反射系数。 目标信息指定单元基于上述信息和目标输入反射系数，指定输出端的反射系数接近目标输入反射系数的目标组合信息。 基于该信息执行阻抗匹配。

公开(公告)号：US20140091875A1

公开(公告)日：2014-04-03

申请号：US14012354

申请日：2013-08-28

申请人： DAIHEN Corporation

发明人： Takashi SHIMOMOTO ,  Koji ITADANI ,  Masakatsu MITO

IPC分类号： H03H7/40

CPC分类号： H03H7/40

摘要： An impedance adjustment apparatus of the invention performs impedance matching using characteristic parameters, even where a high frequency power source of variable frequencies is used. The apparatus is applicable to a power supply system using a high frequency power source of variable frequencies. Characteristic parameters obtained by targeting a portion of combinations of position information (C) of a variable capacitor and output frequency information (F) of the power source are stored in a memory. A T-parameter acquisition unit acquires characteristic parameters corresponding to (Cnow, Fnow) at the current time. An output reflection coefficient calculation unit calculates a reflection coefficient of an output end. A target information specifying unit, based on the above information and a target input reflection coefficient, specifies target combination information in which a reflection coefficient of an output end approaches the target input reflection coefficient. Impedance matching is performed based on this information.

摘要翻译： 本发明的阻抗调整装置即使在使用可变频率的高频电源的情况下，也使用特性参数进行阻抗匹配。 该装置适用于使用可变频率的高频电源的电源系统。 通过将可变电容器的位置信息（C）和电源的输出频率信息（F）的组合的一部分定位获得的特征参数存储在存储器中。 T参数获取单元在当前时间获取对应于（Cnow，Fnow）的特征参数。 输出反射系数计算单元计算输出端的反射系数。 目标信息指定单元基于上述信息和目标输入反射系数，指定输出端的反射系数接近目标输入反射系数的目标组合信息。 基于该信息执行阻抗匹配。