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公开(公告)号：US10211807B2
公开(公告)日：2019-02-19
申请号：US15036734
申请日：2014-09-17
发明人： Tomo Fujii , Kozo Shibutani , Satoru Ishino , Yoshinari Morimoto , Tadataka Koga , Kazuki Otani
IPC分类号： H01L41/047 , H01L41/09 , H01L41/22 , H03H9/21 , H03H9/05 , H03H9/215 , H01L41/053 , H01L41/33 , H03H9/02 , H03H9/10 , H03H3/02
摘要： This piezoelectric wafer has: a piezoelectric vibration piece; a frame portion that supports the piezoelectric vibration piece; and a coupling portion that couples the piezoelectric vibration piece to the frame portion. The piezoelectric vibration piece is broken off at the coupling portion and separated from the piezoelectric wafer. On front and back surfaces of the coupling portion, grooved slits extending along a width direction of the coupling portion are formed except for parts of the coupling portion in the width direction. An electrode on at least one of front and back surfaces of the piezoelectric vibration piece is extracted to a frame-portion side of the piezoelectric wafer by way of the part of the coupling portion in the width direction.
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公开(公告)号：US10224898B2
公开(公告)日：2019-03-05
申请号：US15036752
申请日：2014-09-17
发明人： Tadataka Koga , Tomo Fujii , Kozo Shibutani , Satoru Ishino , Yoshinari Morimoto , Kazuki Otani
IPC分类号： H03H9/21 , H01L41/22 , H03H9/05 , H03H9/215 , H01L41/047 , H01L41/053 , H01L41/33 , H03H9/02 , H03H9/10 , H03H3/02
摘要： This piezoelectric wafer has: a piezoelectric vibration piece; a frame portion that supports the piezoelectric vibration piece; and a coupling portion that couples the piezoelectric vibration piece to the frame portion. A pair of first and second metal bumps is formed in juxtaposition on the piezoelectric vibration piece. The coupling portion has slits extending in its width direction except in a bridge, i.e., a part of the coupling portion in its width direction. An end in the width direction of the bridge is distantly spaced from the first and second metal bumps both in a direction perpendicular to the width direction of the coupling portion with no overlap with these metal bumps.
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