公开(公告)号：US20230333267A1

公开(公告)日：2023-10-19

申请号：US17998732

申请日：2020-05-13

Applicant: DECTRIS AG

Inventor： Alfonso Gonzalez TABOADA ,  Pietro ZAMBON ,  Michael RISSI ,  Roger SCHNYDER ,  Michal BOCHENEK ,  Arne JENSEN

IPC: H01L23/00 ,  G01T1/24 ,  H01L27/146

CPC classification number: G01T1/247 ,  H01L24/48 ,  H01L27/14634 ,  H01L27/14636 ,  H01L27/14663 ,  H01L27/1469 ,  H01L24/16 ,  H01L2224/16145 ,  H01L2224/48227

Abstract: A radiation detector for position-resolved detection of radiation is provided as well as a method of manufacturing such radiation detector. The radiation detector comprises at least one sensor tile (1) with sensor material sensitive to the radiation, the sensor tile (1) defining a horizontal plane; a set of pixels (2) of electrically conducting material in contact with the sensor material; at least one ASIC (5) with input contacts (4) in electrical connection with the pixels (2), wherein at least one input contact (4) is horizontally offset relative to a corresponding pixel (2); and a redistribution layer (10) between the at least one sensor tile (1) and the at least one ASIC (5), the redistribution layer (10) comprising conductor tracks (11) electrically connecting the input contacts (4) with the corresponding pixels (2). At least one of the conductor tracks (11) crosses at least one crossed pixel different from the corresponding pixel. At least one crossed pixel has a void (14) of the electrically conducting material corresponding to at least a portion of projections of the conductor tracks (11). In this way, parasitic capacitances between different pixels (2) are minimized or avoided, and the quality of the position-resolved image is improved.