公开(公告)号：US20240413184A1

公开(公告)日：2024-12-12

申请号：US18698018

申请日：2021-12-23

Applicant: Dectris AG

Inventor： Michael RISSI ,  Tilman DONATH ,  Christian DISCH

IPC: H01L27/146

Abstract: A radiation detector for position-resolved detection of radiation comprises at least one sensor tile with sensor material sensitive to the radiation. The sensor tile defines a horizontal plane spanned by a first axis and a second axis orthogonal to the first axis. A set of sensor pixels of electrically conductive material is arranged in the horizontal plane and in contact with the sensor material. The set comprises a subset of inner sensor pixels, wherein an inner sensor pixel has a neighbor sensor pixel in each direction of the first axis and the second axis. At least two neighboring inner sensor pixels of the subset show an extension along the second axis that exceeds an extension along the first axis. The radiation detector further comprises at least one readout chip assigned to the at least one sensor tile and extending along the first axis and the second axis.

公开(公告)号：US12106932B2

公开(公告)日：2024-10-01

申请号：US17617624

申请日：2019-06-13

Applicant: DECTRIS AG

Inventor： Radosav Pantelic ,  Vittorio Boccone

IPC: H01J37/26

CPC classification number: H01J37/261 ,  H01J2237/026 ,  H01J2237/2802

Abstract: An electron detector comprises a sensor module comprising a sensor for detecting electrons, and an electronics module comprising circuitry for processing signals received from the sensor module. Wiring is provided for electrically connecting the sensor module to the electronics module. An adaptor is arranged between the sensor module and the electronics module. The adaptor comprises a passage for the wiring, and shielding elements for shielding from radiation.

公开(公告)号：US20220238301A1

公开(公告)日：2022-07-28

申请号：US17617624

申请日：2019-06-13

Applicant: DECTRIS AG

Inventor： Radosav PANTELIC ,  Vittorio BOCCONE

IPC: H01J37/26

Abstract: An electron detector comprises a sensor module comprising a sensor for detecting electrons, and an electronics module comprising circuitry for processing signals received from the sensor module. Wiring is provided for electrically connecting the sensor module to the electronics module. An adaptor is arranged between the sensor module and the electronics module. The adaptor comprises a passage for the wiring, and shielding elements for shielding from radiation.

公开(公告)号：US20240162002A1

公开(公告)日：2024-05-16

申请号：US18549028

申请日：2021-03-05

Applicant: DECTRIS AG

Inventor： Michael RISSI ,  Roland HORISBERGER ,  Roger SCHNYDER ,  Alfonso Gonzalez Taboada

IPC: H01J37/244 ,  H01J37/28

CPC classification number: H01J37/244 ,  H01J37/28

Abstract: A radiation detector for position-resolved detection of radiation comprises at least one sensor tile with a front side facing incident radiation, and a back side opposite the front side. The sensor tile comprises a sensor material sensitive to the radiation. A front electrode is arranged on the front side of the sensor tile. A braking layer is arranged on the front electrode and at least partly covers the front electrode, for decelerating electrons in the incident radiation. A set of contacts of electrically conducting material is arranged on the back side of the sensor tile and in contact with the sensor material, thereby defining sensor pixels. At least one ASIC comprises a set of readout circuits in electrical connection with the contacts, each readout circuit being configured to process a signal received from the sensor pixel the readout circuit is electrically connected to. Each readout circuit of the set is configured to provide an output signal representative of the radiation incident in the corresponding sensor pixel.

公开(公告)号：US20230333267A1

公开(公告)日：2023-10-19

申请号：US17998732

申请日：2020-05-13

Applicant: DECTRIS AG

Inventor： Alfonso Gonzalez TABOADA ,  Pietro ZAMBON ,  Michael RISSI ,  Roger SCHNYDER ,  Michal BOCHENEK ,  Arne JENSEN

IPC: H01L23/00 ,  G01T1/24 ,  H01L27/146

CPC classification number: G01T1/247 ,  H01L24/48 ,  H01L27/14634 ,  H01L27/14636 ,  H01L27/14663 ,  H01L27/1469 ,  H01L24/16 ,  H01L2224/16145 ,  H01L2224/48227

Abstract: A radiation detector for position-resolved detection of radiation is provided as well as a method of manufacturing such radiation detector. The radiation detector comprises at least one sensor tile (1) with sensor material sensitive to the radiation, the sensor tile (1) defining a horizontal plane; a set of pixels (2) of electrically conducting material in contact with the sensor material; at least one ASIC (5) with input contacts (4) in electrical connection with the pixels (2), wherein at least one input contact (4) is horizontally offset relative to a corresponding pixel (2); and a redistribution layer (10) between the at least one sensor tile (1) and the at least one ASIC (5), the redistribution layer (10) comprising conductor tracks (11) electrically connecting the input contacts (4) with the corresponding pixels (2). At least one of the conductor tracks (11) crosses at least one crossed pixel different from the corresponding pixel. At least one crossed pixel has a void (14) of the electrically conducting material corresponding to at least a portion of projections of the conductor tracks (11). In this way, parasitic capacitances between different pixels (2) are minimized or avoided, and the quality of the position-resolved image is improved.