公开(公告)号：US20170102274A1

公开(公告)日：2017-04-13

申请号：US15128453

申请日：2015-03-24

Applicant: DENSO CORPORATION

Inventor： Kentaro MIZUNO ,  Rie TAGUCHI ,  Shoji HASHIMOTO ,  Yoshie OHIRA ,  Takashi KATSUMATA ,  Kouhei YAMAGUCHI

IPC: G01L1/18 ,  G01L9/06 ,  G01L9/00

CPC classification number: G01L1/18 ,  G01L9/0054 ,  G01L9/0055 ,  G01L9/06

Abstract: A force detection apparatus includes a substrate and a force transmission block. The substrate includes: a high-sensitive mesa gauge that is provided on a main surface, extends in a first direction to produce a relatively large change of an electric resistance in accordance with compressive stress, and includes a top surface; a low-sensitive mesa gauge that is provided on the main surface, extends in a second direction to produce a relatively small change of an electric resistance, and includes a top surface; and a mesa lead that is provided on the main surface, extends in a third direction, and includes a top surface. The force transmission block contacts the top surface of the high-sensitive mesa gauge and the top surface of the low-sensitive mesa gauge, and is non-contact with at least a part of the top surface of the mesa lead.