公开(公告)号：US11745374B2

公开(公告)日：2023-09-05

申请号：US17144318

申请日：2021-01-08

申请人： DISCO CORPORATION

发明人： Satoshi Hanajima ,  Jun Nakama

IPC分类号： B26D1/14 ,  H01L21/66 ,  H01L21/78 ,  H01L21/67

CPC分类号： B26D1/141 ,  H01L21/67092 ,  H01L21/78 ,  H01L22/12

摘要： A cutting apparatus includes a holding table that has at at least a part of a holding surface a transparent section including a transparent member and that holds a workpiece, a cutting unit including a cutting blade that cuts the workpiece held by the holding table, and a cutting water nozzle that supplies cutting water during cutting of the workpiece by the cutting blade, an imaging camera that images the workpiece through the transparent section, and a removing unit that removes a liquid adhered to the transparent section. The removing unit includes a contact member positioned at a contact position for making contact with the transparent section and a retracted position, and an X-axis moving unit that relatively moves on the transparent section the contact member making contact with the transparent section.

公开(公告)号：US11699606B2

公开(公告)日：2023-07-11

申请号：US17215118

申请日：2021-03-29

申请人： DISCO CORPORATION

发明人： Yoshimasa Kojima ,  Jun Nakama ,  Satoshi Hanajima

IPC分类号： H01L21/67 ,  H01L21/687

CPC分类号： H01L21/67288 ,  H01L21/67092 ,  H01L21/68764

摘要： A cutting apparatus includes a table including a support plate transparent in a visible region, a cutting unit, a first feeding mechanism that includes a first moving section for supporting the table and a first motor, a second feeding mechanism that includes a second moving section for supporting the cutting unit and a second motor, a first camera disposed on the side of a first surface of the support plate, a second camera disposed on the side of a second surface opposite to the first surface of the support plate, and a storage section that stores positional deviation amounts in the X-axis direction and the Y-axis direction between an imaging region at a reference position of the first camera and an imaging region at a reference position of the second camera.

公开(公告)号：US12051613B2

公开(公告)日：2024-07-30

申请号：US17140595

申请日：2021-01-04

申请人： DISCO CORPORATION

发明人： Yoshimasa Kojima ,  Jun Nakama ,  Satoshi Hanajima

IPC分类号： H01L21/687 ,  B23K26/08 ,  H01L21/67

CPC分类号： H01L21/68764 ,  H01L21/67259 ,  B23K26/0823 ,  B23K26/0853

摘要： A method of using a processing apparatus that includes a holding unit with a rotatable chuck table for holding a workpiece; a processing unit for processing the workpiece; a camera for imaging the workpiece that is movable in an indexing feed direction; and a control unit for controlling the components. The method includes forming a linear processed mark in the workpiece, and then moving the chuck table to an imaging zone, where the camera images the processed mark. The method further includes calculating correction values or a correction angle, and carrying out processing feed of the chuck table in the imaging zone under a condition in which the camera has been corrected in position in the Y-axis direction based on the correction values or the chuck table has been rotated by the correction angle.