公开(公告)号：US20210191071A1

公开(公告)日：2021-06-24

申请号：US17120711

申请日：2020-12-14

Applicant: DISCO CORPORATION

Inventor： Osamu OMACHI ,  Takeshi DEJIMA ,  Junichi KUKI

IPC: G02B7/182

Abstract: An optical element unit includes a reflective optical element and a support that, when the optical element is disposed at a predetermined position in an optical system, is fixed by a fixing device to support the optical element. The support is configured so that, owing to the fixing of the support by the fixing device, a strain to be produced in the optical element upon fixing the optical element is reduced compared with a case in which the optical element is fixed directly by the fixing device.

公开(公告)号：US20240033942A1

公开(公告)日：2024-02-01

申请号：US18358393

申请日：2023-07-25

Applicant: DISCO CORPORATION

Inventor： Jun SADA ,  Yuuki YASUDA ,  Takeshi DEJIMA

IPC: B25J11/00 ,  B25J19/00 ,  B25J15/06 ,  B25J5/02

CPC classification number: B25J11/0095 ,  B25J19/00 ,  B25J15/0616 ,  B25J5/02

Abstract: A transfer unit of a transfer apparatus includes a battery that is a power source of respective components, a suction mechanism that is a suction source of a transfer pad, a release mechanism that is an air source of the transfer pad, and a water supply mechanism that causes circulation of water stored in a water reservoir, which are all provided inside a housing of the transfer unit. This eliminates the need to externally supply the transfer unit with electric power, water, and air, and hence, the transfer unit does not include wires and pipes that are routed externally from the transfer unit and an accommodating member for accommodating the wires and pipes. Consequently, generation of dust due to rubbing between the accommodating member and the wires and pipes can be suppressed.