公开(公告)号：US20240109217A1

公开(公告)日：2024-04-04

申请号：US18470857

申请日：2023-09-20

申请人： DISCO CORPORATION

发明人： Tsutomu SUMA

IPC分类号： B26D7/08 ,  B26D1/14 ,  H01L21/67

CPC分类号： B26D7/088 ,  B26D1/141 ,  H01L21/67092

摘要： A cutting liquid supply unit of a cutting apparatus includes a pair of gutter forming nozzles that are disposed to face each other in such a manner as to sandwich a cutting blade and that supply a cutting liquid to the cutting blade to form gutters extending in a processing progression direction, and a tip nozzle that supplies the cutting liquid from the outer circumferential side of the cutting blade toward the cutting blade on the upstream side in the processing progression direction. The tip nozzle supplies the cutting liquid toward a processing point at which the cutting blade cuts into a workpiece, and guides the cutting liquid by the gutters toward the downstream side in the processing progression direction.