公开(公告)号：US20120119649A1

公开(公告)日：2012-05-17

申请号：US13282918

申请日：2011-10-27

申请人： Daisuke ITOMURA ,  Ryonosuke TERA ,  Yasuaki HIROKAWA ,  Hayato NAGAYA

发明人： Daisuke ITOMURA ,  Ryonosuke TERA ,  Yasuaki HIROKAWA ,  Hayato NAGAYA

IPC分类号： H05H1/24

CPC分类号： H05H1/46 ,  C23C16/26 ,  C23C16/515 ,  H05H2001/4682 ,  H05H2001/4697

摘要： A plasma generating apparatus includes: a power supply one of whose electrodes is connected to vacuum chamber walls of N vacuum chambers; an oscillator which outputs a pulse signal at every predetermined period; N pulse amplifying circuits which are connected in parallel to the oscillator as well as to the other electrode of the power supply, and each of which amplifies the pulse signal and supplies the amplified pulse signal to a corresponding one of N electrodes disposed in the N vacuum chambers; and at least (N−1) timing generating circuits which are connected between the oscillator and at least (N−1) pulse amplifying circuits, and which delay the pulse signal by respectively different delay times so that at any specific time, the pulse signal is supplied to only one of the pulse amplifying circuits.

摘要翻译： 一种等离子体发生装置，包括：电极，其电极与N个真空室的真空室壁连接; 每个预定周期输出脉冲信号的振荡器; N个脉冲放大电路并联连接到振荡器和电源的另一个电极，并且每个放大脉冲信号并将放大的脉冲信号提供给设置在N个真空中的N个电极中的对应的一个 房间 以及至少（N-1）个定时发生电路，其连接在振荡器和至少（N-1）个脉冲放大电路之间，并且通过分别不同的延迟时间来延迟脉冲信号，使得在任何特定时间，脉冲信号 仅提供给一个脉冲放大电路。