公开(公告)号：US5529015A

公开(公告)日：1996-06-25

申请号：US388005

申请日：1995-02-13

申请人： Dale A. Watring ,  Martin L. Johnson

发明人： Dale A. Watring ,  Martin L. Johnson

IPC分类号： C30B11/00 ,  C30B30/08 ,  C30B11/02

CPC分类号： C30B11/002 ,  C30B30/08 ,  Y10T117/10 ,  Y10T117/1004 ,  Y10T117/1008 ,  Y10T117/1092

摘要： An ampoule failure system for use in material processing furnaces comprising a containment cartridge and an ampoule failure sensor. The containment cartridge contains an ampoule of toxic material therein and is positioned within a furnace for processing. An ampoule failure probe is positioned in the containment cartridge adjacent the ampoule for detecting a potential harmful release of toxic material therefrom during processing. The failure probe is spaced a predetermined distance from the ampoule and is chemically chosen so as to undergo a timely chemical reaction with the toxic material upon the harmful release thereof.The ampoule failure system further comprises a data acquisition system which is positioned externally of the furnace and is electrically connected to the ampoule failure probe so as to form a communicating electrical circuit. The data acquisition system includes an automatic shutdown device for shutting down the furnace upon the harmful release of toxic material. It also includes a resistance measuring device for measuring the resistance of the failure probe during processing. The chemical reaction causes a step increase in resistance of the failure probe whereupon the automatic shutdown device will responsively shut down the furnace.

摘要翻译： 一种用于材料加工炉的安瓿故障系统，包括容纳筒和安瓿故障传感器。 容纳筒在其中含有一安瓿的有毒物质，并且位于炉内进行处理。 安瓿故障探针位于与安瓿相邻的容纳筒中，用于在处理期间检测有毒物质的有害释放。 故障探针与安瓿间隔预定距离，并进行化学选择，以便在有害物质释放时及时与有毒物质进行化学反应。 安瓿故障系统还包括位于炉外部并与安瓿故障探针电连接以形成通信电路的数据采集系统。 数据采集​​系统包括一个自动关闭装置，用于在有毒物质的有害释放时关闭炉子。 它还包括用于在加工期间测量故障探头的电阻的电阻测量装置。 化学反应导致故障探针的电阻逐步增加，自动关机装置将响应地关闭炉子。