公开(公告)号：US20070211257A1

公开(公告)日：2007-09-13

申请号：US11276676

申请日：2006-03-09

申请人： Daniel Kearl ,  Michael Monroe ,  Henry Lewis ,  Melinda Valencia ,  James McKinnell ,  James Przybyla ,  Arthur Piehl ,  Stephen Potochnik

发明人： Daniel Kearl ,  Michael Monroe ,  Henry Lewis ,  Melinda Valencia ,  James McKinnell ,  James Przybyla ,  Arthur Piehl ,  Stephen Potochnik

IPC分类号： G01B9/02

CPC分类号： G02B26/001

摘要： A composite partially reflecting element of a Fabry-Perot interferometer includes a transparent plate having a surface facing toward the optical gap of the interferometer, a partially reflecting layer disposed on the surface of the transparent plate facing toward the optical gap, and at least one protective layer on at least one side of the partially reflecting layer.

摘要翻译： 法布里 - 珀罗干涉仪的复合部分反射元件包括具有朝向干涉仪的光学间隙的表面的透明板，设置在面向光学间隙的透明板的表面上的部分反射层，以及至少一个保护性 层在该部分反射层的至少一侧上。

公开(公告)号：US20050176212A1

公开(公告)日：2005-08-11

申请号：US11092410

申请日：2005-03-28

申请人： Michael Monroe ,  Eric Nikkel ,  Michele Szepesi ,  Stephen Potochnik ,  Richard Tomasco

发明人： Michael Monroe ,  Eric Nikkel ,  Michele Szepesi ,  Stephen Potochnik ,  Richard Tomasco

IPC分类号： B81B7/00 ,  G02B26/00 ,  G02B26/08 ,  H01L21/20

CPC分类号： B81C1/00174 ,  B81B2201/042 ,  G02B26/0841

摘要： A method of forming a MEMS device includes providing a substructure including a base material and at least one conductive layer formed on a side of the base material, forming a dielectric layer over the at least one conductive layer of the substructure, defining an actuating area for the MEMS device on the dielectric layer, including depositing a conductive material on the dielectric layer and communicating the conductive material with the at least one conductive layer of the substructure through the dielectric layer, forming a sacrificial layer over the conductive material and the dielectric layer, including depositing silicon over the conductive material and the dielectric layer, and forming a substantially planar surface of the silicon, forming an actuating element over the sacrificial layer within the actuating area, including communicating the actuating element with the conductive material of the actuating area through the sacrificial layer, and substantially removing the sacrificial layer between the actuating element a n d the dielectric layer.

摘要翻译： 一种形成MEMS器件的方法包括提供一种子结构，其包括基底材料和形成在该基底材料一侧上的至少一个导电层，在该子结构的该至少一个导电层上形成介电层，该电介质层限定用于 所述MEMS器件包括在所述电介质层上沉积导电材料，并且通过所述电介质层将所述导电材料与所述子结构的所述至少一个导电层连接，在所述导电材料和所述电介质层上形成牺牲层， 包括在导电材料和电介质层上沉积硅，以及形成硅的基本平坦的表面，在致动区域内的牺牲层上形成致动元件，包括使致动元件与致动区域的导电材料通过 牺牲层，并且基本上除去牺牲物 驱动元件之间的电介质层。

公开(公告)号：US20050073735A1

公开(公告)日：2005-04-07

申请号：US10677825

申请日：2003-10-02

申请人： Michael Monroe ,  Eric Nikkel ,  Michele Szepesi ,  Stephen Potochnik ,  Richard Tomasco

发明人： Michael Monroe ,  Eric Nikkel ,  Michele Szepesi ,  Stephen Potochnik ,  Richard Tomasco

IPC分类号： B81B7/00 ,  G02B26/00 ,  G02B26/08 ,  H01L21/20

CPC分类号： B81C1/00174 ,  B81B2201/042 ,  G02B26/0841

摘要： A method of forming a MEMS device includes providing a substructure including a base material and at least one conductive layer formed on a side of the base material, forming a dielectric layer over the at least one conductive layer of the substructure, defining an actuating area for the MEMS device on the dielectric layer, including depositing a conductive material on the dielectric layer and communicating the conductive material with the at least one conductive layer of the substructure through the dielectric layer, forming a sacrificial layer over the conductive material and the dielectric layer, including depositing silicon over the conductive material and the dielectric layer, and forming a substantially planar surface of the silicon, forming an actuating element over the sacrificial layer within the actuating area, including communicating the actuating element with the conductive material of the actuating area through the sacrificial layer, and substantially removing the sacrificial layer between the actuating element and the dielectric layer.

公开(公告)号：US20050236681A1

公开(公告)日：2005-10-27

申请号：US10832367

申请日：2004-04-27

申请人： Stephen Potochnik ,  Kenneth Faase

发明人： Stephen Potochnik ,  Kenneth Faase

IPC分类号： B81C1/00 ,  H01L23/58

CPC分类号： B81C1/00476 ,  B81C99/0065

摘要： A method of indicating the progress of a sacrificial material removal process, the method, comprising; freeing a portion of a member, the member being disposed in a cage and laterally surrounded by the sacrificial material; and preventing the freed portion of the member from floating away by retaining the freed member.

摘要翻译： 一种指示牺牲材料去除过程进展的方法，所述方法包括：将构件的一部分释放，所述构件设置在笼中并被牺牲材料横向包围; 并且通过保持释放的构件来防止构件的释放部分浮起。

公开(公告)号：US20090275098A1

公开(公告)日：2009-11-05

申请号：US12434315

申请日：2009-05-01

申请人： Christopher Beatty ,  Stephen Potochnik ,  Grant Pease

发明人： Christopher Beatty ,  Stephen Potochnik ,  Grant Pease

IPC分类号： C12P7/06

CPC分类号： C12P7/06 ,  Y02E50/17 ,  Y02P20/129

摘要： A system and process for the utilization of xylose during fermentation is described. The system uses a fermenter and a separate reactor to isomerize the xylose to xylulose. The separation of the two processes allows the optimization of each process since the isomerization operates ideally in a calcium free environment near pH 7.5 while the fermentation operates ideally below a pH of 6. Control of pH is assisted by the modulation of CO2 in the fermentation medium. Xylulose is fermented to ethanol by numerous standard yeasts although other products are also possible. The separate reactor may be run in a single pass, or, more preferably in a recirculating mode to allow full isomerization while the xylulose product is being consumed by the yeast. A preferred embodiment includes a Simultaneous Saccharification and Fermentation system where the liquid portion of the fermenting broth is isomerized and returned to the fermentation vessel.

摘要翻译： 描述了在发酵期间利用木糖的系统和方法。 该系统使用发酵罐和单独的反应器将木糖异构化成木酮糖。 两种方法的分离允许每个方法的优化，因为异构化理想地在pH7.5附近的无钙环境中运行，而发酵理想地低于pH6，发酵操作的pH值通过发酵培养基中CO 2的调节来辅助 。 尽管其他产品也是可能的，但是由许多标准的酵母菌将酵母发酵成乙醇。 单独的反应器可以在单程中进行，或者更优选以循环模式运行，以允许完全异构化，同时木酮糖产物被酵母消耗。 优选的实施方案包括同时糖化和发酵系统，其中发酵液的液体部分被异构化并返回到发酵容器。