公开(公告)号：US20060005883A1

公开(公告)日：2006-01-12

申请号：US11063745

申请日：2005-02-24

申请人： Daniel Mudd ,  William White ,  Virginia Miller ,  Christopher Davis ,  Kimura Miyoshi ,  Tadahiro Yasuda

发明人： Daniel Mudd ,  William White ,  Virginia Miller ,  Christopher Davis ,  Kimura Miyoshi ,  Tadahiro Yasuda

IPC分类号： G05D7/06

CPC分类号： G05D7/0186 ,  Y10T137/7761

摘要： A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together. A mass flow controller comprising with an input, an output, a flow path, a pressure transducer and the above flow restrictor.

公开(公告)号：US20070089789A1

公开(公告)日：2007-04-26

申请号：US11549084

申请日：2006-10-12

申请人： Daniel Mudd ,  William White

发明人： Daniel Mudd ,  William White

IPC分类号： G05D7/06

CPC分类号： G01F1/86 ,  G01F1/88 ,  G05D7/0635 ,  Y10T137/7761

摘要： A mass flow controller is disclosed and includes body portion having a first internal passage and at least second internal passage formed therein, a flow control valve coupled to the body portion and in communication with the first and second internal passages, at least one pressure transducer coupled to the body portion and in communication with at least one of the first internal passage, the second internal passage, and the flow restrictor, a nonlinear flow restrictor configured to produce a high compressible laminar flow therethrough coupled to the second internal passage, a thermal sensor in communication with at least one of the first internal passage, the second internal passage, and the flow restrictor, and an exhaust vessel in communication with the flow restrictor.

摘要翻译： 公开了质量流量控制器，并且包括主体部分，其具有第一内部通道和形成在其中的至少第二内部通道，流量控制阀，其联接到主体部分并与第一和第二内部通道连通，至少一个压力传感器耦合 连接到主体部分并且与第一内部通道，第二内部通道和限流器中的至少一个连通;非线性流量限制器，被配置为产生通过其耦合到第二内部通道的高可压缩层流;热传感器 与第一内部通道，第二内部通道和限流器中的至少一个连通，以及与限流器连通的排气容器。

公开(公告)号：US08744784B2

公开(公告)日：2014-06-03

申请号：US12513353

申请日：2007-10-29

申请人： Tadahiro Yasuda ,  Kazuhiro Matsuura ,  Kentaro Nagai ,  Daniel Mudd

发明人： Tadahiro Yasuda ,  Kazuhiro Matsuura ,  Kentaro Nagai ,  Daniel Mudd

IPC分类号： G01F1/00 ,  G01F7/00

CPC分类号： G05D7/0635 ,  G01F1/50 ,  G01F1/88 ,  G01F25/0007 ,  G05B23/0221

摘要： This invention provides a diagnostic mechanism of a differential pressure type mass flow controller comprising a diagnostic parameter calculating section that obtains a mass flow rate integrated value by means of an integrating calculation from the lowering pressure value of an inlet side sensor among the inlet side sensor and an outlet side sensor arranged in communication respectively at the inlet side and the outlet side of a differential pressure generating resistive element that generates a differential pressure between the inlet and the outlet by changing a flow rate control valve arranged on the channel where a fluid flows from a flow rate control state to a closed state, and further obtains a diagnostic volume value from the obtained mass flow rate integrated value, and a comparing section that compares the diagnostic volume value obtained at the diagnostic parameter calculating section with a specified volume value.

摘要翻译： 本发明提供了一种差压式质量流量控制器的诊断机构，其包括：诊断参数计算部，其通过来自入口侧传感器的入口侧传感器的降压值的积分运算获得质量流量积分值; 出口侧传感器，其分别设置在差压产生电阻元件的入口侧和出口侧，通过改变布置在流体流动的通道上的流量控制阀，从而在入口和出口之间产生压差 流量控制状态到关闭状态，并且从获得的质量流量积分值进一步获得诊断体积值，以及比较部，其将诊断参数计算部获得的诊断体积值与规定的体积值进行比较。

公开(公告)号：US20100070240A1

公开(公告)日：2010-03-18

申请号：US12513353

申请日：2007-10-29

申请人： Tadahiro Yasuda ,  Kazuhiro Matsuura ,  Kentaro Nagai ,  Daniel Mudd

发明人： Tadahiro Yasuda ,  Kazuhiro Matsuura ,  Kentaro Nagai ,  Daniel Mudd

IPC分类号： G06F15/00

CPC分类号： G05D7/0635 ,  G01F1/50 ,  G01F1/88 ,  G01F25/0007 ,  G05B23/0221

摘要： This invention provides a diagnostic mechanism of a differential pressure type mass flow controller comprising a diagnostic parameter calculating section that obtains a mass flow rate integrated value by means of an integrating calculation from the lowering pressure value of an inlet side sensor among the inlet side sensor and an outlet side sensor arranged in communication respectively at the inlet side and the outlet side of a differential pressure generating resistive element that generates a differential pressure between the inlet and the outlet by changing a flow rate control valve arranged on the channel where a fluid flows from a flow rate control state to a closed state, and further obtains a diagnostic volume value from the obtained mass flow rate integrated value, and a comparing section that compares the diagnostic volume value obtained at the diagnostic parameter calculating section with a specified volume value.

摘要翻译： 本发明提供了一种差压式质量流量控制器的诊断机构，其包括：诊断参数计算部，其通过来自入口侧传感器的入口侧传感器的降压值的积分运算获得质量流量积分值; 出口侧传感器，其分别设置在差压产生电阻元件的入口侧和出口侧，通过改变布置在流体流动的通道上的流量控制阀，从而在入口和出口之间产生压差 流量控制状态到关闭状态，并且从获得的质量流量积分值进一步获得诊断体积值，以及比较部，其将诊断参数计算部获得的诊断体积值与规定的体积值进行比较。