High cycle MEMS device
    9.
    发明授权
    High cycle MEMS device 有权
    高周期MEMS器件

    公开(公告)号:US07142076B2

    公开(公告)日:2006-11-28

    申请号:US10868130

    申请日:2004-06-14

    IPC分类号: H01H51/22

    摘要: A high life cycle and low voltage MEMS device. In an aspect of the invention, separate support posts are disposed to prevent a suspended switch pad from touching the actuation pad while permitting the switch pad to ground a signal line. In another aspect of the invention, cantilevered support beams are made from a thicker material than the switching pad. Increased thickness material in the cantilever tends to keep the switch flat in its resting position. Features of preferred embodiments include dimples in the switch pad to facilitate contact with a signal line and serpentine cantilevers arranged symmetrically to support the switch pad.

    摘要翻译: 高寿命周期和低电压MEMS器件。 在本发明的一个方面中,设置单独的支撑柱以防止悬挂的开关垫接触致动垫,同时允许开关垫将信号线接地。 在本发明的另一方面,悬臂支撑梁由比切换垫更厚的材料制成。 悬臂中厚度增加的材料倾向于将开关保持在其静止位置。 优选实施例的特征包括开关板中的凹坑,以便于与信号线接触并且对称地布置以支撑开关垫的蛇形悬臂。