公开(公告)号：US07307714B2

公开(公告)日：2007-12-11

申请号：US11133889

申请日：2005-05-20

申请人： David G. Cyr ,  Christopher P. Daigler ,  David R. Fladd ,  David C. Jenne ,  Albert R. Nieber ,  Nikki Jo Russo ,  Paul J. Shustack

发明人： David G. Cyr ,  Christopher P. Daigler ,  David R. Fladd ,  David C. Jenne ,  Albert R. Nieber ,  Nikki Jo Russo ,  Paul J. Shustack

IPC分类号： G01N21/88

CPC分类号： G01N21/958 ,  G01N21/8803

摘要： Disclosed are process and apparatus for inspecting internal inclusions in internally transmissive substrates. The process involves applying a black coating to one major surface of the substrate, submerging the substrate in a refractive index-matching fluid, and scanning the substrate with a collimated light beam. The scattered light signals produced by the inclusions can be detected by the human eye or by using a light detector. By the use of index-matching fluid and the black coating, the signal-to-noise ratio of the process and apparatus are enhanced. A preferred black coating is one cured from an electron beam or photo polymerizable coating composition applied to the major surface. The process and apparatus are particularly suitable for inspecting internal inclusions in an internally transmissive substrate having considerable amount of surface defects or contoured surface that prevent it from inspection in a gas medium.

摘要翻译： 公开了用于检查内部透射性基板中的内部夹杂物的工艺和装置。 该方法包括将黑色涂层施加到基底的一个主表面，将基底浸没在折射率匹配流体中，并用准直光束扫描基底。 由夹杂物产生的散射光信号可以由人眼或使用光检测器检测。 通过使用折射率匹配流体和黑色涂层，可以提高工艺和装置的信噪比。 优选的黑色涂层是从施加到主表面的电子束或光聚合涂层组合物固化的。 该方法和装置特别适用于检查内部透射基底中的内部夹杂物，其具有相当大量的表面缺陷或轮廓表面，从而阻止其在气体介质中检查。