公开(公告)号：US20070115557A1

公开(公告)日：2007-05-24

申请号：US11623946

申请日：2007-01-17

申请人： David George ,  W. Schluchter ,  Robert Belt

发明人： David George ,  W. Schluchter ,  Robert Belt

IPC分类号： G02B3/12

CPC分类号： G02B3/12

摘要： A refractive optical system may be a collimator, focusing optical system, reducer, or expander and includes an entrance optical element, an exit optical element, and a volume disposed between the entrance and exit optical elements. The volume is configured to have an index of refraction that is insensitive to changes in atmospheric conditions of the ambient environment. A surface of curvature of an input surface of the entrance optical element is parallel to a wavefront curvature of an input light beam and an output surface of the exit optical element is parallel to a wavefront curvature of an exit light beam. Accordingly, the wavefront curvature of the exit light beam is insensitive to the ambient environment permitting the production and operation environments to change without a change to the performance of the optical system.

摘要翻译： 折射光学系统可以是准直器，聚焦光学系统，减速器或扩展器，并且包括入射光学元件，出射光学元件和设置在入射和出射光学元件之间的体积。 体积被配置为具有对周围环境的大气条件的变化不敏感的折射率。 入射光学元件的输入表面的曲面平行于输入光束的波前曲率，出射光学元件的输出表面平行于出射光束的波前曲率。 因此，出射光束的波前曲率对周围环境不敏感，允许生产和操作环境改变而不改变光学系​​统的性能。

公开(公告)号：US20050259268A1

公开(公告)日：2005-11-24

申请号：US10850811

申请日：2004-05-21

申请人： W. Schluchter

发明人： W. Schluchter

IPC分类号： G01B9/02 ,  G01B11/00 ,  G03F7/20 ,  G03F9/00 ,  H01L21/027

CPC分类号： G01B9/02022 ,  G01B9/02018 ,  G01B2290/70 ,  G03F7/70775 ,  G03F9/7049

摘要： A system for measuring a displacement along a first axis includes an apparatus movable at least along a second axis perpendicular to the first axis, a measurement mirror mounted to the apparatus at an angle greater than 0° relative to the first axis, and an interferometer with a beam-splitter. The beam-splitter splits an input beam into a measurement beam and a reference beam, directs the measurement beam in at least two passes to the measurement mirror, and combining the measurement beam after said at least two passes and the reference beam into an output beam. At least exterior to the interferometer, the measurement beam travels in paths that are not parallel to the first axis.

摘要翻译： 用于测量沿着第一轴的位移的系统包括至少可沿着垂直于第一轴线的第二轴线移动的装置，相对于第一轴线以大于0°的角度安装到装置的测量镜，以及具有 分束器。 分光器将输入光束分成测量光束和参考光束，将测量光束在至少两次通过中引导到测量镜，并将测量光束在所述至少两次通过之后和参考光束组合成输出光束 。 至少在干涉仪的外部，测量光束以不平行于第一轴线的路径行进。

公开(公告)号：US20070024976A1

公开(公告)日：2007-02-01

申请号：US11195545

申请日：2005-08-01

申请人： W. Schluchter ,  Ron Bevis ,  John Bockman ,  Greg Felix ,  Terry Riener

发明人： W. Schluchter ,  Ron Bevis ,  John Bockman ,  Greg Felix ,  Terry Riener

IPC分类号： G02B27/28

CPC分类号： G02B27/285 ,  G02B5/305

摘要： A beam distribution apparatus includes a stack of parallelogram prisms and beam-splitting coatings each located between opposing parallel faces of adjacent parallelogram prisms. The stack is mounted on an entrance face of a triangular prism. The triangular prism includes the entrance face, a reflective face, and an exit face. The reflective face has optical surfaces for shaping output beams from the stack and reflecting the output beams through the exit face. A beam distribution apparatus includes a stack of parallelogram prisms and beam-splitting coatings each located between opposing parallel faces of adjacent parallelogram prisms in the stack. The beam-splitting coatings transmit light of a first polarization and reflect a portion of light of a second polarization. The apparatus further includes retardation plates each mounted on a face of a parallelogram prism adjacent to a beam-splitting coating, and corrective reflective optics for shaping output beams each mounted on a retardation plate.

摘要翻译： 光束分配装置包括平行四边形棱镜和分束涂层的叠层，每个位于相邻的平行四边形棱镜的相对的平行面之间。 堆叠安装在三角棱镜的入射面上。 三角棱镜包括入射面，反射面和出射面。 反射面具有光学表面，用于对来自堆叠的输出光束进行整形，并将输出光束反射通过出射面。 光束分配装置包括平行四边形棱镜和分束涂层的堆叠，每个层叠位于堆叠中的相邻平行四边形棱镜的相对的平行面之间。 分束涂层透射第一偏振光并反射第二偏振光的一部分。 该装置还包括各自安装在与分束涂层相邻的平行四边形棱镜的表面上的延迟板，以及校正反射光学器件，用于对每个安装在延迟板上的输出光束进行整形。

公开(公告)号：US20060017933A1

公开(公告)日：2006-01-26

申请号：US10897467

申请日：2004-07-23

申请人： W. Schluchter ,  L. Lee

发明人： W. Schluchter ,  L. Lee

IPC分类号： G01B9/02

CPC分类号： G01B9/02058 ,  G01B9/02003 ,  G01B2290/15 ,  G01B2290/70

摘要： An interferometer system for measuring a displacement along a first direction includes (1) a measurement roof optic (e.g., a porro prism) mounted to a stage translatable along the first direction, (2) a polarizing beam splitter having (a) a first face opposite the measurement roof optic and (b) a second face opposite the first face, (3) a first wave plate located between the measurement roof optic and the first face of the polarizing beam splitter, and (4) a redirecting optic located opposite the first face of the polarizing beam splitter. A measurement path through the system includes only segments located substantially in a plane defined by the first direction and a second direction orthogonal to the first direction.

摘要翻译： 一种用于测量沿着第一方向的位移的干涉仪系统包括：（1）安装到沿着第一方向可平移的台架的测量屋顶光学器件（例如，孔棱镜），（2）偏振分束器，其具有（a）第一面 （b）与第一面相对的第二面，（3）位于测量屋顶光学元件与偏振光束分离器的第一面之间的第一波片，以及（4）位于测量屋顶光学元件 偏振分束器的第一面。 通过系统的测量路径仅包括基本上位于由第一方向限定的平面中的分段和与第一方向正交的第二方向。