Enhanced photo-EMF sensor with high bandwidth and large field of view
    1.
    发明授权
    Enhanced photo-EMF sensor with high bandwidth and large field of view 失效
    具有高带宽和大视野的增强型光电感应传感器

    公开(公告)号:US06818880B2

    公开(公告)日:2004-11-16

    申请号:US10259259

    申请日:2002-09-26

    IPC分类号: H01L3100

    CPC分类号: H01L31/10 H01L31/09

    摘要: A photo-EMF sensor and a method of making same has a substrate with a semiconducting layer; a plurality of sensing regions in the layer, each sensing region including (i) a pair of electrodes disposed in, on or above the layer and (ii) an active region in the layer disposed adjacent said pair of electrodes; and a plurality of inactive regions in said the arranged between adjacent sensing regions. The inactive regions and the sensing regions are dosed with a desensitizing agent, the inactive regions receiving a relatively higher dose of the desensitizing agent and the sensing regions receiving a relatively lower dose of the desensitizing agent. The active layer is preferably placed in a monolithic Fabry-Perot cavity to enhance the optical efficiency and performance of the sensor.

    摘要翻译: 光电感应传感器及其制造方法具有带有半导体层的衬底; 所述层中的多个感测区域,每个感测区域包括(i)设置在所述层中或上方的一对电极,以及(ii)邻近所述一对电极布置的所述层中的有源区域; 以及所述布置在相邻感测区域之间的多个无效区域。 非活性区域和感测区域配有脱敏剂,非活性区域接受相对较高剂量的脱敏剂,感测区域接受相对较低剂量的脱敏剂。 有源层优选地放置在单片法布里 - 珀罗腔中,以增强传感器的光学效率和性能。

    Laser-ultrasonic non-destructive, non-contacting inspection system
    2.
    发明授权
    Laser-ultrasonic non-destructive, non-contacting inspection system 失效
    激光超声波无损检测系统

    公开(公告)号:US5585921A

    公开(公告)日:1996-12-17

    申请号:US404660

    申请日:1995-03-15

    IPC分类号: G01N29/07 G01N29/24 G01B9/02

    摘要: A laser-ultrasonic inspection system is provided for on-line and off-line inspection of a workpiece. The system utilizes an optical acoustic wave generation and detection system with relatively high spatial resolution and which appreciably reduces the effects of parasitic acoustic coupling. An array of acoustic waves are generated in the workpiece by a short pulse optical transmitter bee with a beam geometry that is tailored to focus the acoustic waves at an inspection site in the workpiece. The acoustic waves that probe the inspection site are then detected by reflecting an optical read-out beam from a surface of the workpiece and optically interfering it with an optical reference beam. The geometry of the optical read-out beam is chosen such that the read-out beam only detects the acoustic waves that arrive from the inspection site (acoustic waves that arrive from other parasitic acoustic sources are out of phase with respect to each other and cancel out). A wavefront compensation system improves acoustic clutter rejection and also improves the signal-to-noise by compensating for phase and amplitude aberrations induced on the optical read-out beam by the optically rough surface of the workpiece.

    摘要翻译: 提供了一种激光超声波检测系统,用于在线和离线检查工件。 该系统利用具有相对较高空间分辨率的光声波产生和检测系统,并明显减少了寄生声耦合的影响。 通过短脉冲光发射器蜂在工件中产生声波阵列,其具有适于将声波聚焦在工件的检查位置处的光束几何形状。 然后通过从工件的表面反射光学读出光束并用光学参考光学光学干涉来检测探测检查部位的声波。 选择光读出光束的几何形状,使得读出光束仅检测从检查位置到达的声波(从其他寄生声源到达的声波相对于彼此异相并取消 出)。 波前补偿系统改善了声杂波抑制,并且还通过补偿由工件的光学粗糙表面在光学读出光束上感生的相位和幅度像差来改善信噪比。

    System and method for detecting ultrasound using time-delay
interferometry
    4.
    发明授权
    System and method for detecting ultrasound using time-delay interferometry 失效
    使用时间延迟干涉法检测超声的系统和方法

    公开(公告)号:US5684592A

    公开(公告)日:1997-11-04

    申请号:US481673

    申请日:1995-06-07

    IPC分类号: G01H9/00 G01B9/02

    CPC分类号: G01H9/00

    摘要: An ultrasound detection system that is relatively insensitive to rough workpiece surfaces, suppresses low frequency noise, and provides high sensitivity without the need for active stabilization. An optical probe beam is reflected and phase modulated by a workpiece surface that is being vibrated by ultrasound. A time-delay interferometer optically interferes the phase modulated probe beam with a time-delayed replica of itself. The optical interference generates optical interference fringes that move in accordance with the workpiece surface velocity. The interference fringes are detected by a non-steady-state photo-electromotive-force (NSS-photo-EMF) detector that generates an output signal when the frequency of fringe motion exceeds a predetermined threshold.

    摘要翻译: 对粗糙的工件表面相对不敏感的超声波检测系统抑制低频噪声,并提供高灵敏度,而不需要主动稳定。 光学探针光束被被超声振动的工件表面反射和相位调制。 时间延迟干涉仪通过自身的延时复制光学干涉相位调制探测光束。 光学干涉产生根据工件表面速度移动的光学干涉条纹。 通过非稳态光电动势(NSS-photo-EMF)检测器检测干涉条纹,当检测条纹运动频率超过预定阈值时,产生输出信号。

    Method and apparatus for reduction of non-adaptive signals in photo-EMF sensors
    5.
    发明授权
    Method and apparatus for reduction of non-adaptive signals in photo-EMF sensors 有权
    用于减少光电感应传感器中非自适应信号的方法和装置

    公开(公告)号:US08030122B1

    公开(公告)日:2011-10-04

    申请号:US12713062

    申请日:2010-02-25

    IPC分类号: H01L31/0224

    CPC分类号: H01L31/09 G01D5/26

    摘要: A method and apparatus for a photoinduced electromotive force sensor. The sensor has an active substrate formed of a semi-insulating photoconductor with sufficient carrier trap density to form an effective charge grating and pairs of electrodes disposed on the active substrate, where the sensor is configured to reduce the photovoltaic effect caused by the incident light in the vicinity of the electrodes. The shape or composition of the electrodes may be selected to reduce the photovoltaic effect or the electrodes may be disposed on the substrate to average out the photovoltaic effect arising from each one of the electrodes.

    摘要翻译: 一种感光电动势传感器的方法和装置。 传感器具有由具有足够的载流子阱密度的半绝缘光电导体形成的有源衬底,以形成有效的电荷光栅和配置在有源衬底上的电极对,其中传感器被配置为减少由入射光引起的光伏效应 电极附近。 可以选择电极的形状或组成以减少光伏效应,或者可以将电极设置在衬底上,以平均每个电极产生的光电效应。

    Method and apparatus for reduction of non-adaptive signals in photo-EMF sensors
    6.
    发明授权
    Method and apparatus for reduction of non-adaptive signals in photo-EMF sensors 失效
    用于减少光电感应传感器中非自适应信号的方法和装置

    公开(公告)号:US07701027B1

    公开(公告)日:2010-04-20

    申请号:US11367073

    申请日:2006-03-03

    IPC分类号: H01L29/41

    CPC分类号: H01L31/09 G01D5/26

    摘要: A method and apparatus for a photoinduced electromotive force sensor. The sensor has an active substrate formed of a semi-insulating photoconductor with sufficient carrier trap density to form an effective charge grating and pairs of electrodes disposed on the active substrate, where the sensor is configured to reduce the photovoltaic effect caused by the incident light in the vicinity of the electrodes. The shape or composition of the electrodes may be selected to reduce the photovoltaic effect or the electrodes may be disposed on the substrate to average out the photovoltaic effect arising from each one of the electrodes.

    摘要翻译: 一种感光电动势传感器的方法和装置。 传感器具有由具有足够的载流子阱密度的半绝缘光电导体形成的有源衬底,以形成有效的电荷光栅和配置在有源衬底上的电极对,其中传感器被配置为减少由入射光引起的光伏效应 电极附近。 可以选择电极的形状或组成以减少光伏效应,或者可以将电极设置在衬底上,以平均每个电极产生的光电效应。

    Coherent detecting receiver using a time delay interferometer and adaptive beam combiner
    8.
    发明授权
    Coherent detecting receiver using a time delay interferometer and adaptive beam combiner 失效
    相干检测接收机采用时延干涉仪和自适应光束组合器

    公开(公告)号:US06819432B2

    公开(公告)日:2004-11-16

    申请号:US09808472

    申请日:2001-03-14

    IPC分类号: G01B902

    CPC分类号: H04B10/60

    摘要: An optical apparatus for coherent detection of an input optical beam. The apparatus includes a beam splitter for splitting the input optical beam into a first component and a second component; an optical delay device arranged to receive the second component, the optical delay device imposing an intentional delay in the second component of the input optical beam; and an adaptive beam combiner coupled to receive the second component with a delay imposed thereon by the optical delay device; and the first component from the beam splitter. The adaptive beam combiner has two exiting components having the same wavefronts and propagating directions as the first and second components and being in quadrature. A detector arrangement is provided for receiving and detecting the first and second exiting components from the adaptive beam combiner.

    摘要翻译: 一种用于相干检测输入光束的光学装置。 该装置包括用于将输入光束分成第一部件和第二部件的分束器; 布置成接收第二分量的光学延迟装置,所述光学延迟装置在输入光束的第二分量中施加有意延迟; 以及耦合以由所述光学延迟装置施加在其上的延迟来接收所述第二部件的自适应光束组合器; 和分束器的第一个部件。 自适应光束组合器具有两个出射分量,其具有与第一和第二分量相同的波前和传播方向,并且正交。 提供了一种检测器装置,用于从自适应光束组合器接收和检测第一和第二出射分量。

    Vibrometer system using a two input beam phase conjugate mirror
    9.
    发明授权
    Vibrometer system using a two input beam phase conjugate mirror 失效
    振动计系统采用双输入光束相位共轭镜

    公开(公告)号:US06657732B2

    公开(公告)日:2003-12-02

    申请号:US09849641

    申请日:2001-05-04

    IPC分类号: G01B902

    CPC分类号: G01H9/00

    摘要: A vibrometer for probing an object to determine its vibratory signature and a method of probing same. The vibrometer includes a laser for generating a laser beam for probing the object; a detector for detecting reflections from the object; and a two beam input phase-conjugate mirror located so as to receive a portion of the laser beam produced by the laser and a portion of the laser beam reflected from the object, the two input beam phase-conjugate mirror reflecting received diffuse signals from the object back towards the object.

    摘要翻译: 用于探测物体以确定其振动特征的振动计和探测方法。 振动计包括用于产生用于探测物体的激光束的激光器; 用于检测来自物体的反射的检测器; 以及双光束输入相位共轭反射镜,其被定位成接收由激光器产生的激光束的一部分和从物体反射的激光束的一部分,两个输入光束相位共轭反射镜反射来自 反对物体。

    Optical frequency modulated transmitter
    10.
    发明授权
    Optical frequency modulated transmitter 有权
    光频调制发射机

    公开(公告)号:US07330665B2

    公开(公告)日:2008-02-12

    申请号:US10630189

    申请日:2003-07-29

    IPC分类号: H04B10/04

    CPC分类号: H04B10/50

    摘要: An optical frequency modulated transmitter includes a plurality of separately phased-controlled slave lasers, the outputs of which are combined to form a single output beam of the transmitter. A master optical oscillator outputs an optical signal for injection locking the plurality of slave lasers, the optical signal being frequency modulated directly in the master optical oscillator or externally thereof. Additionally, a method of frequency modulating an optical beam is disclosed using a plurality of slave lasers. Each of the slave lasers has an output, the outputs of which are combined to form the optical beam. The plurality of slave lasers is injection locked to an optical output of a master oscillator. The optical output of the master oscillator is frequency modulated before the optical output is applied to the plurality of lasers. Each slave laser of the plurality is phased controlled relative to other slave lasers of the plurality.

    摘要翻译: 光调制发射机包括多个单独定相控制的从属激光器,其输出被组合以形成发射机的单个输出光束。 主光学振荡器输出用于注入锁定多个从属激光器的光信号,该光信号直接在主光学振荡器中或其外部进行频率调制。 此外,公开了一种使用多个从属激光器对光束进行频率调制的方法。 每个从属激光器具有输出,其输出被组合以形成光束。 多个从属激光器被注入锁定到主振荡器的光输出。 在将光输出施加到多个激光器之前,主振荡器的光输出被调频。 多个的每个从属激光器相对于多个其他从属激光器被相位控制。