公开(公告)号：US06985286B2

公开(公告)日：2006-01-10

申请号：US10787809

申请日：2004-02-25

申请人： David R. Shafer ,  Helmut Beierl ,  Gerhard Fürter ,  Karl-Heinz Schuster ,  Wilhelm Ulrich

发明人： David R. Shafer ,  Helmut Beierl ,  Gerhard Fürter ,  Karl-Heinz Schuster ,  Wilhelm Ulrich

IPC分类号： G02B13/14

CPC分类号： G02B17/0892 ,  G02B13/143 ,  G02B17/08 ,  G03F7/70225 ,  G03F7/70275

摘要： A projection exposure lens system has an object side catadioptric system, and intermediate image and a refractive lens system. The refractive lens system from its intermediate image side and in the direction of its image plane has a first lens group of positive refractive power, a second lens group of negative refractive power, a third lens group of positive refractive power, a fourth lens group of negative refractive power, and a fifth lens group of positive refractive power.

公开(公告)号：US06717722B2

公开(公告)日：2004-04-06

申请号：US10079964

申请日：2002-02-20

申请人： David R. Shafer ,  Helmut Beierl ,  Gerhard Fürter ,  Karl-Heinz Schuster ,  Wilhelm Ulrich

发明人： David R. Shafer ,  Helmut Beierl ,  Gerhard Fürter ,  Karl-Heinz Schuster ,  Wilhelm Ulrich

IPC分类号： G02B1314

CPC分类号： G02B17/0892 ,  G02B13/143 ,  G02B17/08 ,  G03F7/70225 ,  G03F7/70275

摘要： A projection exposure lens system has an object side catadioptric system, and intermediate image and a refractive lens system. The refractive lens system from its intermediate image side and in the direction of its image plane has a first lens group of positive refractive power, a second lens group of negative refractive power, a third lens group of positive refractive power, a fourth lens group of negative refractive power, and a fifth lens group of positive refractive power.

摘要翻译： 投影曝光透镜系统具有物体侧反射折射系统，中间像和折射透镜系统。 折射透镜系统从其中间像侧并且在其图像平面的方向上具有正屈光力的第一透镜组，负折光力的第二透镜组，正折光力的第三透镜组，第四透镜组 负折射光焦度和正屈光力的第五透镜组。

公开(公告)号：US06496306B1

公开(公告)日：2002-12-17

申请号：US09364382

申请日：1999-07-29

申请人： David R. Shafer ,  Helmut Beierl ,  Gerhard Fürter ,  Karl-Heinz Schuster ,  Wilhelm Ulrich

发明人： David R. Shafer ,  Helmut Beierl ,  Gerhard Fürter ,  Karl-Heinz Schuster ,  Wilhelm Ulrich

IPC分类号： G02B1314

CPC分类号： G02B17/0892 ,  G02B13/143 ,  G02B17/08 ,  G03F7/70225 ,  G03F7/70275

摘要： A projection exposure lens system has an object side catadioptric system, and intermediate image and a refractive lens system. The refractive lens system from its intermediate image side and in the direction of its image plane has a first lens group of positive refractive power, a second lens group of negative refractive power, a third lens group of positive refractive power, a fourth lens group of negative refractive power, and a fifth lens group of positive refractive power.

公开(公告)号：US06252712B1

公开(公告)日：2001-06-26

申请号：US09252636

申请日：1999-02-19

申请人： Gerhard Fürter ,  Winfried Kaiser ,  Christian Wagner ,  Michael Gerhard ,  Karl-Heinz Schuster

发明人： Gerhard Fürter ,  Winfried Kaiser ,  Christian Wagner ,  Michael Gerhard ,  Karl-Heinz Schuster

IPC分类号： G02B530

CPC分类号： G03F7/70566 ,  G02B5/3083 ,  G02B13/143 ,  G02B27/0025 ,  G02B27/28 ,  G03F7/70225 ,  Y10S359/90

摘要： An optical system with at least one optical element that causes a disturbance of the distribution of polarization over the cross section of a light beam wherein at least one birefringent optical element is provided, with a thickness which varies irregularly over the cross section, such that the disturbance of the distribution of polarization is at least partially compensated.

摘要翻译： 一种具有至少一个光学元件的光学系统，其在光束的横截面上引起偏振分布的干扰，其中提供至少一个双折射光学元件，其厚度在横截面上不规则地变化，使得 至少部分地补偿了极化分布的干扰。