Monolithic vibrating rate gyro structure

    公开(公告)号:US06414416B1

    公开(公告)日:2002-07-02

    申请号:US09912377

    申请日:2001-07-26

    IPC分类号: H01L4108

    CPC分类号: G01C19/5607

    摘要: A vibrating rate gyro structure machined in a plate of material and comprising a fixed part, a resonator, and a mechanical system connecting the resonator to the fixed part. The mechanical system comprises a first mobile mass part connected to one end of the resonator, a second mobile mass part (4) connected to the resonator and situated in the vicinity of the other end of the resonator, two flexible arms situated on both sides of the resonator and each connecting the first mobile mass part to the second mobile mass part, and two other flexible arms situated on both sides of the resonator and connecting the second mobile mass part to the fixed part.