Monolithic vibrating rate gyro structure

    公开(公告)号:US06414416B1

    公开(公告)日:2002-07-02

    申请号:US09912377

    申请日:2001-07-26

    IPC分类号: H01L4108

    CPC分类号: G01C19/5607

    摘要: A vibrating rate gyro structure machined in a plate of material and comprising a fixed part, a resonator, and a mechanical system connecting the resonator to the fixed part. The mechanical system comprises a first mobile mass part connected to one end of the resonator, a second mobile mass part (4) connected to the resonator and situated in the vicinity of the other end of the resonator, two flexible arms situated on both sides of the resonator and each connecting the first mobile mass part to the second mobile mass part, and two other flexible arms situated on both sides of the resonator and connecting the second mobile mass part to the fixed part.

    Force transducer having a central portion of reduced thickness
    2.
    发明授权
    Force transducer having a central portion of reduced thickness 有权
    力传感器具有减小厚度的中心部分

    公开(公告)号:US06807872B2

    公开(公告)日:2004-10-26

    申请号:US10217516

    申请日:2002-08-14

    IPC分类号: G01L104

    CPC分类号: G01L1/106

    摘要: The invention concerns a transducer constituting the sensitive member of a sensor whose frequency varies as a function of the intensity of force applied to it. The force transducer comprises a beam having length and rectangular cross-section with thickness and width and flexionally vibrating. The beam has a thickness reduced over a central portion of its length, its width remaining constant.

    摘要翻译: 本发明涉及构成传感器敏感元件的换能器,其频率随着施加到其上的力的强度而变化。 力传感器包括具有长度和矩形横截面的梁,其厚度和宽度并且挠曲地振动。 梁的长度中心部分的厚度减小,其宽度保持不变。

    Mechanical decoupling device for monolithic differential vibrating sensor
    3.
    发明授权
    Mechanical decoupling device for monolithic differential vibrating sensor 有权
    单片差动振动传感器的机械去耦装置

    公开(公告)号:US07448268B2

    公开(公告)日:2008-11-11

    申请号:US11568644

    申请日:2005-04-21

    IPC分类号: G01P15/097

    CPC分类号: G01P15/097 H03H9/505

    摘要: A sensor comprises two identical vibrating members operating with a common working frequency and joined to each other by a mechanical decoupling device. The device comprises a frame and two connecting bridges each supporting one member. The frame comprises a succession of mass portions and thinned portions so that the frequency of one mode of structural resonance of the frame is substantially equal to the common working frequency, and each connecting bridge is disposed in a node of vibration of the frame at the common working frequency. Thus, the vibrations of the two vibrating members are decoupled from each other.

    摘要翻译: 传感器包括两个相同的振动部件,其工作频率为共同的工作频率,并通过机械解耦装置相互连接。 该装置包括框架和两个连接桥,每个支撑一个构件。 该框架包括一连串的质量部分和减薄部分,使得框架的一种结构共振模式的频率基本上等于公共工作频率,并且每个连接桥被布置在共同的框架的振动节点中 工作频率 因此,两个振动构件的振动彼此分离。

    Monolithic miniature accelerometer
    4.
    发明授权
    Monolithic miniature accelerometer 有权
    单片微型加速度计

    公开(公告)号:US06386035B2

    公开(公告)日:2002-05-14

    申请号:US09828925

    申请日:2001-04-10

    IPC分类号: G01P1510

    摘要: A monolithic miniature accelerometer machined in a plate of material, comprising a fixed part, two first mobile mass parts referred to as inertial masses, two hinge blades each having one end fastened to one of the two mobile mass parts, and two resonators each having one end fastened to one of the two mobile mass parts, a third mobile mass part fastened to the other end of each of the two resonators and of each of the two hinge blades, and a flexible stem situated between the first two mobile mass parts and connecting the third mobile mass part to the fixed part.

    摘要翻译: 一种整体式微型加速度计,其加工成材料板,包括固定部分,称为惯性质量的两个第一移动质量部件,每个具有一个端部固定到两个移动质量部件中的一个的两个铰链叶片,以及两个共振器,每个具有一个 端部紧固到两个移动质量部件中的一个,固定到两个谐振器中的每一个和两个铰链叶片中的每一个的另一端的第三移动质量部分,以及位于前两个移动质量部分之间的柔性杆和连接 第三个移动质量部分到固定部分。

    Mechanical decoupling device for monlithic differential vibrating sensor
    5.
    发明申请
    Mechanical decoupling device for monlithic differential vibrating sensor 有权
    一体差动振动传感器的机械去耦装置

    公开(公告)号:US20070163347A1

    公开(公告)日:2007-07-19

    申请号:US11568644

    申请日:2005-04-21

    IPC分类号: G01P15/097

    CPC分类号: G01P15/097 H03H9/505

    摘要: A sensor comprises two identical vibrating members operating with a common working frequency and joined to each other by a mechanical decoupling device. The device comprises a frame and two connecting bridges each supporting one member. The frame comprises a succession of mass portions and thinned portions so that the frequency of one mode of structural resonance of the frame is substantially equal to the common working frequency, and each connecting bridge is disposed in a node of vibration of the frame at the common working frequency. Thus, the vibrations of the two vibrating members are decoupled from each other.

    摘要翻译: 传感器包括两个相同的振动部件,其工作频率为共同的工作频率,并通过机械解耦装置相互连接。 该装置包括框架和两个连接桥,每个支撑一个构件。 该框架包括一连串的质量部分和减薄部分,使得框架的一种结构共振模式的频率基本上等于公共工作频率,并且每个连接桥被布置在共同的框架的振动节点中 工作频率 因此,两个振动构件的振动彼此分离。

    Monolithic accelerometric transducer
    6.
    发明授权
    Monolithic accelerometric transducer 失效
    单片加速度传感器

    公开(公告)号:US5962786A

    公开(公告)日:1999-10-05

    申请号:US27859

    申请日:1998-02-23

    摘要: A monolithic accelerometric transducer comprises a fixed part, two mobile mass parts and a resonator having ends fastened to said mobile parts, a flexible frame around the two mobile parts, and two connecting members connecting the frame to the second mobile part and to the fixed part. The frame provides a mechanical filter between the resonator and the fixed part which is not affected by the vibrations of the resonator. The quality factor Q of the resonator is not degraded and the measurement provided by the transducer is more accurate. In a differential output accelerometer, the position of the transducer is deduced from that of another, identical transducer by rotation of 180.degree. about an axis parallel to the resonator, the fixed parts of the transducers being fastened together.

    摘要翻译: 单片加速度传感器包括固定部分,两个移动质量部分和具有紧固到所述可移动部件的端部的谐振器,围绕两个可移动部件的柔性框架,以及将框架连接到第二移动部件和固定部件的两个连接构件 。 该框架在谐振器和固定部件之间提供机械滤波器,其不受谐振器振动的影响。 谐振器的质量因子Q不降低,并且由换能器提供的测量更准确。 在差分输出加速度计中,通过围绕平行于谐振器的轴旋转180°,推导出换能器的位置,换能器的位置被固定在一起。

    Element vibrating in two uncoupled modes, and use in vibrating rate gyroscope
    7.
    发明授权
    Element vibrating in two uncoupled modes, and use in vibrating rate gyroscope 有权
    元件以两个非耦合模式振动,并用于振动率陀螺仪

    公开(公告)号:US08869615B2

    公开(公告)日:2014-10-28

    申请号:US13262317

    申请日:2010-04-01

    IPC分类号: G01C19/56 G01C19/5607

    CPC分类号: G01C19/5607 G01C19/5621

    摘要: The present disclosure relates to a vibrating element which is planar parallelly to an electrical crystallographic axis of a piezoelectric material such as quartz. The element comprises a beam holding electrodes, a stationary portion rigidly connected to one end of the beam, and a solid portion rigidly connected to the other end of the beam. The structure with facets from the chemical machining of the element has an axis of symmetry parallel to the electrical axis, and the solid portion has a center of gravity on the axis of symmetry. The useful vibration modes of the vibrating element, according to which the solid portion is reciprocatingly rotated about the axis of symmetry and reciprocatingly moved parallel to the plane of the element, are uncoupled. The measurement of an angular speed by a rate gyroscope including said vibrating elements is more precise.

    摘要翻译: 本公开涉及一种平行于诸如石英的压电材料的电结晶轴平面的振动元件。 元件包括梁保持电极,刚性地连接到梁的一端的固定部分和刚性地连接到梁的另一端的实心部分。 具有来自元件的化学加工的刻面的结构具有平行于电轴的对称轴,并且实心部分在对称轴上具有重心。 振动元件的有用的振动模式,其中固体部分围绕对称轴线往复运动并且平行于元件的平面往复移动,是非耦合的。 通过包括所述振动元件的速率陀螺仪测量角速度更精确。

    Electrodes and associated electronic circuits for a piezoelectric vibrating gyrometer
    8.
    发明授权
    Electrodes and associated electronic circuits for a piezoelectric vibrating gyrometer 有权
    用于压电振动陀螺仪的电极和相关电子电路

    公开(公告)号:US08978473B2

    公开(公告)日:2015-03-17

    申请号:US13518148

    申请日:2010-12-20

    CPC分类号: G01C19/5614 G01C19/5607

    摘要: The Coriolis-effect gyrometer has a tuning fork having two tines, which tuning fork is formed in a plate of piezoelectric crystal and provided with electrodes composed of ribbon conductors supported solely by the faces of the tines parallel to the plate. The drive excitation and drive detection electrodes are connected to an oscillator circuit, and the Coriolis detection electrodes are connected to a detection circuit. For each of the faces parallel to the plate of each of the tines the drive detection ribbon is disposed between the drive excitation ribbon and the Coriolis detection ribbon and is connected to the inverting input of an operational amplifier, the non-inverting input of which is connected to the electric ground, said operational amplifier forming part of the oscillator circuit.

    摘要翻译: 科里奥利效应陀螺仪具有一个具有两个叉齿的音叉,该音叉形成在压电晶体板中,并且具有由平行于该平板的齿的表面支撑的带状导体组成的电极。 驱动激励和驱动检测电极连接到振荡电路,科里奥利检测电极与检测电路相连。 对于平行于每个齿的板的每个面,驱动检测带设置在驱动激励带和科里奥利检测带之间,并连接到运算放大器的反相输入,其非反相输入 连接到电地,所述运算放大器构成振荡电路的一部分。

    ELECTRODES AND ASSOCIATED ELECTRONIC CIRCUITS FOR A PIEZOELECTRIC VIBRATING GYROMETER
    9.
    发明申请
    ELECTRODES AND ASSOCIATED ELECTRONIC CIRCUITS FOR A PIEZOELECTRIC VIBRATING GYROMETER 有权
    用于压电振子的电极和相关电子电路

    公开(公告)号:US20120279303A1

    公开(公告)日:2012-11-08

    申请号:US13518148

    申请日:2010-12-20

    IPC分类号: G01C19/5607

    CPC分类号: G01C19/5614 G01C19/5607

    摘要: The Coriolis-effect gyrometer has a tuning fork having two tines (110, 120), which tuning fork is formed in a plate of piezoelectric crystal and provided with electrodes composed of ribbon conductors supported solely by the faces of the tines parallel to the plate. The drive excitation (E1, E2) and drive detection (P1, P2) electrodes are connected to an oscillator circuit (200), and the Coriolis detection electrodes (D1, D2) are connected to a detection circuit (300). For each of the faces parallel to the plate of each of the tines the drive detection ribbon (2; 12; 5; 15) is disposed between the drive excitation ribbon (1; 11; 6; 16) and the Coriolis detection ribbon (3; 13; 4; 14) and is connected to the inverting input of an operational amplifier (201; 202), the non-inverting input of which is connected to the electric ground, said operational amplifier forming part of the oscillator circuit.

    摘要翻译: 科里奥利效应陀螺仪具有具有两个尖齿(110,120)的音叉,该音叉形成在压电晶体板中,并且具有由平行于平板的尖齿表面支撑的带状导体组成的电极。 驱动激励(E1,E2)和驱动检测(P1,P2)电极连接到振荡电路(200),科里奥利检测电极(D1,D2)连接到检测电路(300)。 对于平行于每个齿的板的每个面,驱动检测带(2; 12; 5; 15)设置在驱动激励带(1; 11; 6; 16)和科里奥利检测带(3 ; 13; 4; 14),并且连接到运算放大器(201; 202)的反相输入端,其同相输入端连接到电接地,所述运算放大器构成振荡器电路的一部分。

    ELEMENT VIBRATING IN TWO UNCOUPLED MODES, AND USE IN VIBRATING RATE GYROSCOPE
    10.
    发明申请
    ELEMENT VIBRATING IN TWO UNCOUPLED MODES, AND USE IN VIBRATING RATE GYROSCOPE 有权
    元件振动在两个未解决的模式,并用于振动率陀螺仪

    公开(公告)号:US20120024060A1

    公开(公告)日:2012-02-02

    申请号:US13262317

    申请日:2010-04-01

    IPC分类号: G01C19/5656 H01L41/04

    CPC分类号: G01C19/5607 G01C19/5621

    摘要: The present disclosure relates to a vibrating element which is planar parallelly to an electrical crystallographic axis of a piezoelectric material such as quartz. The element comprises a beam holding electrodes, a stationary portion rigidly connected to one end of the beam, and a solid portion rigidly connected to the other end of the beam. The structure with facets from the chemical machining of the element has an axis of symmetry parallel to the electrical axis, and the solid portion has a center of gravity on the axis of symmetry. The useful vibration modes of the vibrating element, according to which the solid portion is reciprocatingly rotated about the axis of symmetry and reciprocatingly moved parallel to the plane of the element, are uncoupled. The measurement of an angular speed by a rate gyroscope including said vibrating elements is more precise.

    摘要翻译: 本公开涉及一种平行于诸如石英的压电材料的电结晶轴平面的振动元件。 元件包括梁保持电极,刚性地连接到梁的一端的固定部分和刚性地连接到梁的另一端的实心部分。 具有来自元件的化学加工的刻面的结构具有平行于电轴的对称轴,并且实心部分在对称轴上具有重心。 振动元件的有用的振动模式,其中固体部分围绕对称轴线往复运动并且平行于元件的平面往复移动,是非耦合的。 通过包括所述振动元件的速率陀螺仪测量角速度更精确。