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1.发明授权Method for determining the position of the edge bead removal line of a disk-like object 有权用于确定盘状物体的边缘珠去除线的位置的方法公开(公告)号：US07973931B2
公开(公告)日：2011-07-05
申请号：US12231465
申请日：2008-09-03
申请人： Detlef Michelsson , Guido Dietzler
发明人： Detlef Michelsson , Guido Dietzler
CPC分类号： G01N21/8806 , G01N21/9503 , G06K9/3216 , G06K2009/3225 , G06T7/0004 , G06T7/12 , G06T2207/30148 , G06T2207/30204
摘要： A method for determining the position of an edge bead removal line of a disk-like object having an edge area and an alignment mark on the edge area is disclosed, wherein the edge area including the edge bead removal line is imaged on a line-by-line basis, an intensity profile I of the imaged edge area including the edge bead removal line is obtained with a camera on a line-by-line basis, and the edge area and the alignment mark are detected, wherein the local intensity maxima I′max of the intensity profile I are plotted as points in a diagram, segment sets are formed in the diagram, the segment sets are fitted in ellipses, and a quality criterion qges is determined for each ellipse.
摘要翻译： 公开了一种用于确定在边缘区域上具有边缘区域和对准标记的圆盘状物体的边缘珠粒移除线的位置的方法，其中包括边缘珠粒移除线的边缘区域被逐行成像 利用相机逐行地获得包括边缘珠去除线的成像边缘区域的强度分布I，并且检测边缘区域和对准标记，其中局部强度最大值I 强度分布I的最大值被绘制为图中的点，在图中形成段集合，将段集合以椭圆拟合，并且为每个椭圆确定质量标准qges。
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2.发明申请Method for determining the position of the edge bead removal line of a disk-like object 有权用于确定盘状物体的边缘珠去除线的位置的方法公开(公告)号：US20090130784A1
公开(公告)日：2009-05-21
申请号：US12231465
申请日：2008-09-03
申请人： Detlef Michelsson , Guido Dietzler
发明人： Detlef Michelsson , Guido Dietzler
CPC分类号： G01N21/8806 , G01N21/9503 , G06K9/3216 , G06K2009/3225 , G06T7/0004 , G06T7/12 , G06T2207/30148 , G06T2207/30204
摘要： A method for determining the position of an edge bead removal line of a disk-like object having an edge area and an alignment mark on the edge area is disclosed, wherein the edge area including the edge bead removal line is imaged on a line-by-line basis, an intensity profile I of the imaged edge area including the edge bead removal line is obtained with a camera on a line-by-line basis, and the edge area and the alignment mark are detected, wherein the local intensity maxima I′max of the intensity profile I are plotted as points in a diagram, segment sets are formed in the diagram, the segment sets are fitted in ellipses, and a quality criterion qges is determined for each ellipse.
摘要翻译： 公开了一种用于确定在边缘区域上具有边缘区域和对准标记的圆盘状物体的边缘珠粒移除线的位置的方法，其中包括边缘珠粒移除线的边缘区域被逐行成像 利用相机逐行地获得包括边缘珠去除线的成像边缘区域的强度分布I，并且检测边缘区域和对准标记，其中局部强度最大值I 强度分布I的最大值被绘制为图中的点，在图中形成段集合，将段集合以椭圆拟合，并且为每个椭圆确定质量标准qges。
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