公开(公告)号：US08726828B2

公开(公告)日：2014-05-20

申请号：US12842728

申请日：2010-07-23

申请人： Dong-Young Joo ,  Tae-Jung Kan

发明人： Dong-Young Joo ,  Tae-Jung Kan

IPC分类号： B05C5/02 ,  G03F7/16

CPC分类号： B05C5/0208 ,  G03F7/16 ,  G03F7/162

摘要： Disclosed is a coating apparatus having a coater chuck capable of improving a photoresist coating uniformity by preventing the coater chuck for performing a photoresist coating process from being sunk, in a manner of employing a different type of a material for making the coater chuck, wherein the coater chuck is made of stone and connected to a a servo motor via a drive shaft, the driving shaft being movable up and down, and a glass substrate coated with photoresist through a slit nozzle is placed on the coater chuck.

摘要翻译： 公开了一种涂布装置，其具有能够通过防止涂布机卡盘进行光刻胶涂布工艺的沉降而提高光致抗蚀剂涂层的均匀性，其方式为使用不同类型的用于制造涂布机卡盘的材料，其中， 涂布机卡盘由石头制成，通过驱动轴连接到伺服电机，驱动轴可上下移动，通过狭缝喷嘴涂覆有光致抗蚀剂的玻璃基板放置在涂布机卡盘上。

公开(公告)号：US20110017129A1

公开(公告)日：2011-01-27

申请号：US12842728

申请日：2010-07-23

申请人： Dong-Young Joo ,  Tae-Jung Kan

发明人： Dong-Young Joo ,  Tae-Jung Kan

IPC分类号： B05C13/00 ,  B05C5/00

CPC分类号： B05C5/0208 ,  G03F7/16 ,  G03F7/162

摘要： Disclosed is a coating apparatus having a coater chuck capable of improving a photoresist coating uniformity by preventing the coater chuck for performing a photoresist coating process from being sunk, in a manner of employing a different type of a material for making the coater chuck, wherein the coater chuck is made of stone and connected to a servo motor via a drive shaft, the driving shaft being movable up and down, and a glass substrate coated with photoresist through a slit nozzle is placed on the coater chuck.

摘要翻译： 公开了一种涂布装置，其具有能够通过防止涂布机卡盘进行光刻胶涂布工艺的沉降而提高光致抗蚀剂涂层的均匀性，其方式为使用不同类型的用于制造涂布机卡盘的材料，其中， 涂布机卡盘由石头制成，通过驱动轴连接到伺服电机，驱动轴可上下移动，通过狭缝喷嘴涂覆有光致抗蚀剂的玻璃基板放置在涂布机卡盘上。