公开(公告)号：US20180188684A1

公开(公告)日：2018-07-05

申请号：US15739116

申请日：2016-12-22

申请人： Dualitas Ltd.

发明人： Brian MULLINS

IPC分类号： G03H1/00 ,  G03H1/22 ,  B29C64/393 ,  B29C64/153 ,  B29C64/268 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y50/02 ,  B23K26/34 ,  B23K26/354

CPC分类号： G03H1/0005 ,  B23K26/34 ,  B23K26/354 ,  B29C64/10 ,  B29C64/153 ,  B29C64/264 ,  B29C64/268 ,  B29C64/386 ,  B29C64/393 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y50/00 ,  B33Y50/02 ,  G03H1/2286 ,  G03H1/2294 ,  G03H2001/0094 ,  G03H2210/20 ,  G03H2225/32 ,  G03H2225/52 ,  G03H2240/51

摘要： A printing device (106) includes a dynamic holography printing application configured to generate a laser control signal and a LCOS-SLM (Liquid Crystal on Silicon Spatial Light Modulator) control signal based on a two-dimensional content corresponding to a lithography mask. A laser source (110) generates a plurality of incident laser beams based on the laser control signal. A LCOS-SLM (112) modulates the plurality of incident laser beams based on the LCOS-SLM control signal, generates a plurality of holographic wavefronts (214,216), each holographic wavefront forming at least one corresponding focal point. The LCOS-SLM generates a plurality of distinct focused light field regions (506,508,510) at interference points of focal points of the plurality of holographic wavefronts. The plurality of distinct focused light field regions correspond to the two-dimensional content.