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公开(公告)号：US6028690A
公开(公告)日：2000-02-22
申请号：US197723
申请日：1998-11-23
CPC分类号： G02B26/0841
摘要： A micromirror array fabricated on a semiconductor substrate 708. The micromirrors in the micromirror array logically divided into an interior active region 704 which selectively modulates light striking the mirrors in the interior active region 704, and an exterior border region 702 for producing a dark border around the image produced by the interior active region 704. A gap between each mirror allows adjacent mirrors to rotate. The gap 712 between mirrors in the interior active region 704 of the array is larger than the gap 710 between at least some of the mirrors in the exterior border region 702. The smaller gap 710 in the exterior region 702 is enabled by restricting mirrors in the exterior region 702 to a single direction of rotation.
摘要翻译： 制造在半导体衬底708上的微镜阵列。微反射镜阵列中的微反射镜在逻辑上被分为内部有源区域704，该有源区域选择性地调制在内部有源区域704中的反射镜的入射光，以及外部边界区域702，用于产生围绕 由内部有源区域704产生的图像。每个反射镜之间的间隙允许相邻的反射镜旋转。 阵列的内部有源区域704中的反射镜之间的间隙712大于外部边界区域702中的至少一些反射镜之间的间隙710.外部区域702中的较小间隙710通过限制外部区域702中的反射镜来实现 外部区域702到单个旋转方向。
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公开(公告)号：US06522454B2
公开(公告)日：2003-02-18
申请号：US09967043
申请日：2001-09-28
申请人： Robert E. Meier , James D. Huffman
发明人： Robert E. Meier , James D. Huffman
IPC分类号： G02B2600
CPC分类号： G02B26/0841
摘要： An improved DMD type spatial light modulator having an array of pixels (18). The pixels (18) are of the “hidden hinge” design, each pixel having a mirror (30) supported over a hinged yoke (32). Addressing electrodes (26, 28) on an underlying metallization layer and addressing electrodes (50, 52) at the yoke level provide electrostatic forces that cause the mirrors to tilt and then to return to their flat state. The pixels (18) are designed to provide increased clearance between the leading edge of the yoke (32) and the underlying metallization layer when the mirrors (30) are tilted. Various features of the improved pixel (18) also improve the contrast ratio of images generated by the DMD.
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3.发明授权Hidden hinge digital micromirror device with improved manufacturing yield and improved contrast ratio 有权隐藏的铰链数字微镜装置，具有改进的制造成品率和改善的对比度公开(公告)号：US06819470B2
公开(公告)日：2004-11-16
申请号：US10359754
申请日：2003-02-06
申请人： Robert E. Meier , James D. Huffman
发明人： Robert E. Meier , James D. Huffman
IPC分类号： G02B2600
CPC分类号： G02B26/0841
摘要： An improved DMD type spatial light modulator having an array of pixels (18). The pixels (18) are of the “hidden hinge” design, each pixel having a mirror (30) supported over a hinged yoke (32). Addressing electrodes (26, 28) on an underlying metallization layer and addressing electrodes (50, 52) at the yoke level provide electrostatic forces that cause the mirrors to tilt and then to return to their flat state. The pixels (18) are designed to provide increased clearance between the leading edge of the yoke (32) and the underlying metallization layer when the mirrors (30) are tilted. Various features of the improved pixel (18) also improve the contrast ratio of images generated by the DMD.
摘要翻译： 具有像素阵列（18）的改进的DMD型空间光调制器。 像素（18）是“隐藏的铰链”设计，每个像素具有支撑在铰接轭（32）上的反射镜（30）。 在底层金属化层上的寻址电极（26,28）和在磁轭级处的寻址电极（50,52）提供静电力，这些静电力使镜子倾斜然后返回到它们的平坦状态。 像素（18）被设计成当镜子（30）倾斜时，在轭（32）的前缘和下面的金属化层之间提供增大的间隙。 改进的像素（18）的各种特征还提高了由DMD产生的图像的对比度。
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公开(公告)号：US06285490B1
公开(公告)日：2001-09-04
申请号：US09475730
申请日：1999-12-30
IPC分类号： G02B2600
CPC分类号： G02B26/0841
摘要： An improved micromechanical device comprising a substrate (104), a deflectable member (102) suspended over the substrate (104), at least one spring-ring (124) supported above the substrate (104); and at least one address electrode (110) spaced apart from substrate (104). The spring-ring (124) resists deflection of the deflectable member (102) when the deflectable member (102) deflects to contact the spring-ring (124). By moving the address electrode (110) off the substrate level, the micromirror is much more immune to particle-caused short circuits, and a planer surface on which to fabricate the mirror (102) is provided without the need to utilize an inverse spacer layer.
摘要翻译： 一种改进的微机械装置，包括衬底（104），悬置在衬底（104）上的可偏转构件（102），支撑在衬底（104）上方的至少一个弹簧环（124）; 以及与衬底（104）间隔开的至少一个地址电极（110）。 当可偏转构件（102）偏转以接触弹簧环（124）时，弹簧环（124）抵抗可偏转构件（102）的偏转。 通过将寻址电极（110）移动离开衬底水平，微镜对于颗粒引起的短路更加免疫，并且提供了在其上制造反射镜（102）的平面，而不需要使用反向间隔层 。
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公开(公告)号：US6147790A
公开(公告)日：2000-11-14
申请号：US311009
申请日：1999-05-13
申请人： Robert E. Meier , Richard L. Knipe
发明人： Robert E. Meier , Richard L. Knipe
CPC分类号： G02B26/0841
摘要： An improved micromechanical device comprising a substrate (104), a rigid deflectable member (302, 314, 326) suspended over the substrate, and at least one spring (328) supported above the substrate and spaced apart from the rigid deflectable member. The spring resists deflection of the rigid deflectable member when the rigid deflectable member deflects to contact the spring. The improved micromechanical device is constructed by fabricating at least one support structure (116) on a substrate, fabricating at least one spring spaced apart from the substrate and supported by at least one of the support structures, and fabricating a deflectable member spaced apart from both the substrate and spring, and supported by at least one of the support structures. The improved micromechanical device is useful in a projection display system in which a micromirror device selectively reflects incident light, as directed by a controller electrically connected to the micromirror device, and the selectively reflected light is focused onto an image plane. The micromirror device is comprised an array of micromirror elements, each comprised of: a substrate, a spring supported by the substrate, and a deflectable rigid member supported by the substrate and spaced apart from the spring. The deflectable rigid member including a mirror to deflect toward the spring, which resists the deflection of the deflectable rigid member.
摘要翻译： 一种改进的微机械装置，包括衬底（104），悬置在衬底上的刚性可偏转构件（302,314,326）以及支撑在衬底上并与刚性可偏转构件间隔开的至少一个弹簧（328）。 当刚性可偏转构件偏转以接触弹簧时，弹簧抵抗刚性可偏转构件的偏转。 改进的微机械装置通过在衬底上制造至少一个支撑结构（116）而构成，制造至少一个与衬底间隔开的弹簧并由至少一个支撑结构支撑，并且制造与两个间隔开的可偏转构件 基板和弹簧，并且由至少一个支撑结构支撑。 改进的微机械装置在投影显示系统中是有用的，其中微反射镜装置根据与微镜装置电连接的控制器的指示选择性地反射入射光，并且选择性反射的光聚焦在图像平面上。 微镜装置包括一组微镜元件，每个微镜元件包括：衬底，由衬底支撑的弹簧以及由衬底支撑并与弹簧间隔开的可偏转的刚性构件。 可偏转的刚性构件包括朝向弹簧偏转的反射镜，其抵抗可偏转的刚性构件的偏转。
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