公开(公告)号：US20220307153A1

公开(公告)日：2022-09-29

申请号：US17616811

申请日：2020-05-28

申请人： EBARA CORPORATION

发明人： Hiroyuki Kanda ,  Hironari Ikeda ,  Masaaki Kimura ,  Mizuki Nagai

IPC分类号： C25D17/00 ,  C25D17/02 ,  C25D17/10

摘要： Provided are an anode holder capable of reducing consumption of an additive in a plating apparatus, and a plating apparatus. An anode holder for holding an anode for use in a plating apparatus is provided, and the anode holder includes an inner space formed in the anode holder, to house the anode, a mask including a plurality of holes, and configured to cover a front surface of the inner space, and a diaphragm, at least part of the diaphragm being fixed to the mask in a region of the mask that covers the front surface of the inner space.