BEARING APPARATUS AND LASER APPARATUS COMPRISING BEARING APPARATUS

    公开(公告)号:US20240035514A1

    公开(公告)日:2024-02-01

    申请号:US18357356

    申请日:2023-07-24

    CPC classification number: F16C32/047 H01S3/036

    Abstract: An object of the invention is to provide a bearing apparatus which is superior in corrosion resistance against a fluorine gas, and superior in dimensional accuracy and durability. For achieving the object, a bearing apparatus for use in an environment where a fluorine gas exists is provided. The bearing apparatus comprises: a magnetic bearing comprising a magnetic member and an electromagnetic coil; and a touchdown bearing for protecting the magnetic bearing, wherein the touchdown bearing comprises an inner ring, an outer ring, and plural rolling members arranged between the inner ring and the outer ring, wherein the inner ring and the outer ring in the touchdown bearing are constructed by using a NiCrAl alloy.

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