公开(公告)号：US20240035514A1

公开(公告)日：2024-02-01

申请号：US18357356

申请日：2023-07-24

Applicant: EBARA CORPORATION ,  Gigaphoton Inc.

Inventor： Ichiju SATOH ,  Motoi NIIZUMA ,  Kazuki HIRASAWA ,  Takuya ISHII

IPC: F16C32/04 ,  H01S3/036

CPC classification number: F16C32/047 ,  H01S3/036

Abstract: An object of the invention is to provide a bearing apparatus which is superior in corrosion resistance against a fluorine gas, and superior in dimensional accuracy and durability. For achieving the object, a bearing apparatus for use in an environment where a fluorine gas exists is provided. The bearing apparatus comprises: a magnetic bearing comprising a magnetic member and an electromagnetic coil; and a touchdown bearing for protecting the magnetic bearing, wherein the touchdown bearing comprises an inner ring, an outer ring, and plural rolling members arranged between the inner ring and the outer ring, wherein the inner ring and the outer ring in the touchdown bearing are constructed by using a NiCrAl alloy.