公开(公告)号：US20210276125A1

公开(公告)日：2021-09-09

申请号：US16499511

申请日：2018-04-30

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Guang LU ,  Brian Johansen ,  Mark Kosmowski ,  Ho Wai Lo ,  Guangyu Li

IPC: B23K26/08 ,  B23K26/082 ,  B23K26/12

Abstract: Varied embodiments of a laser-based machine tool, and techniques for controlling the same are provided. Some embodiments relate to techniques to facilitate uniform and reproducible processing of workpieces. Other embodiments relate to a zoom lens having a quickly-variable focal length. Still other embodiments relate to various features of a laser-based multi-axis machine tool that can facilitate efficient delivery of laser energy to a scan head, that can address thermomechanical issues that may arise during workpiece processing, etc. Another embodiment relates to techniques for minimizing or preventing undesired accumulation of particulate matter on workpiece surfaces during processing. A number of other embodiments and arrangements are also detailed.