公开(公告)号：US20190001434A1

公开(公告)日：2019-01-03

申请号：US16067711

申请日：2017-03-17

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： Yuan Liu ,  Honghua Hu ,  Jim Brookhyser ,  Guangyu Li ,  Brandon Bilyeu ,  Kurt Eaton

IPC: B23K26/03 ,  B23K26/06 ,  B23K26/073 ,  B23K26/082 ,  B23K26/384

Abstract: Disclosed is a method and an apparatus to process a workpiece including producing a first beam of laser energy characterized by a first spatial intensity distribution. A first workpiece is processed using the first beam of laser energy to form a plurality of features at a first distance between the scan lens and the first workpiece and forming a second features at a second distance. The method includes determining which of the plurality of features has a shape that most closely resembles the shape of the first spatial intensity distribution and setting a process distance as the distance that produced that feature. Using this process distance, a surface of a second workpiece is processed using second beam of laser energy with a second spatial intensity distribution.