公开(公告)号：US20230140696A1

公开(公告)日：2023-05-04

申请号：US17902048

申请日：2022-09-02

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Jung Won YU ,  Jin Hong KIM ,  Young Jae LEE ,  Kil Taek LIM

IPC: G05B13/04 ,  G05B13/02

Abstract: Provided is a method of optimizing parameter intervals of manufacturing processes based on prediction intervals. The method includes: collecting process data by applying an experiment design method to a target process; training a second-order polynomial regression model based on the collected process data; estimating importance values of each input variable with respect to each output variable using the second-order polynomial regression model; defining an objective function for process optimization based on the second-order polynomial regression model; optimizing each parameter value by applying an optimization algorithm to the defined objective function; and optimizing each parameter interval including the optimized parameter value in an input space using the prediction interval of the second-order polynomial regression model.