公开(公告)号：US20160173006A1

公开(公告)日：2016-06-16

申请号：US15018906

申请日：2016-02-09

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Sang Kyun LEE ,  Moonkeun KIM

IPC: H02N2/18 ,  H01L41/04

CPC classification number: H02N2/186 ,  H01L41/04 ,  H01L41/1136 ,  H02N2/188 ,  H02N2/22 ,  Y10T29/42

Abstract: The inventive concept discloses a piezoelectric energy harvesting array and a method of manufacturing the same. The manufacturing method may include forming a plurality of piezoelectric energy harvesting devices; connecting masses to one side of the piezoelectric energy harvesting devices and connecting the other side of the piezoelectric energy harvesting devices facing the masses to a base; and individually tuning a resonant frequency of each of the piezoelectric energy harvesting devices to prevent mismatch of resonant frequency when the masses vibrate.