公开(公告)号：US20220153946A1

公开(公告)日：2022-05-19

申请号：US17528006

申请日：2021-11-16

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Jeong Hun KIM ,  Seung Eon MOON ,  Jong Pil IM

IPC: C08J7/04 ,  G01L9/06

Abstract: The present disclosure provides is a method of manufacturing a flexible pressure sensor by forming the polymer support and the conductive particles from a single uniform solution and performing a curing of the polymer support and a growth of the conductive particles in a continuous process. The method of manufacturing a flexible pressure sensor includes: preparing a solution by adding a polymer support material, a conductive particle, and a photoinitiator to a solvent; applying the solution on a flexible substrate; and irradiating ultraviolet rays onto the solution applied on the flexible substrate to cure the solution and form a solid film.

公开(公告)号：US20140208838A1

公开(公告)日：2014-07-31

申请号：US13897293

申请日：2013-05-17

Applicant: Electronics and Telecommunications Research Institute

Inventor： Seung Eon MOON ,  Jae Woo LEE ,  Hyung-Kun LEE ,  Nak Jin CHOI ,  Woo Seok YANG ,  Jong Dae KIM

IPC: G01M15/10

CPC classification number: G01N27/16

Abstract: Provided is a catalytic combustible gas sensor using a porous membrane embedded micro-heater and a micro electro mechanical system (MEMS) technology. The present disclosure provides a gas sensor that is structurally, mechanically, and electrically stable, and has a simple device fabrication process in a MEMS catalytic combustible gas sensor that is miniaturized and also consumes a significantly small amount of power by puncturing a plurality of holes in membranes, a heating resistor, and a sensing electrode, by etching and thereby thermally isolating a substrate by a predetermined thickness through the plurality of holes, and by including a sensing structure formed using a sensing material and a compensation structure formed using a compensation material.

Abstract translation: 提供了一种使用多孔膜嵌入式微型加热器和微机电系统（MEMS）技术的催化可燃气体传感器。 本公开提供了一种在结构上，机械上和电气上稳定的气体传感器，并且在MEMS催化可燃气体传感器中具有简单的装置制造工艺，其小型化并且还通过在多孔中刺穿多个孔而消耗极少量的功率 膜，加热电阻器和感测电极，通过蚀刻，从而通过多个孔将基板热隔离预定厚度，并且包括使用感测材料形成的感测结构和使用补偿材料形成的补偿结构。