公开(公告)号：US20210327683A1

公开(公告)日：2021-10-21

申请号：US17232789

申请日：2021-04-16

申请人： EMD CORPORATION ,  TOMOEGAWA CO., LTD.

发明人： Akinori EBE ,  Hajime TSUDA ,  Hideki MORIUCHI

IPC分类号： H01J37/32

摘要： A radio-frequency antenna through which a high amount of current can be efficiently passed even at a radio-frequency level for plasma generation, as well as a plasma processing device utilizing the radio-frequency antenna. A radio-frequency antenna includes a metal fiber sheet. A plasma processing device includes: a vacuum container including a wall having an opening; a radio-frequency antenna including a metal fiber sheet and located at the opening; and a dielectric protection plate located closer to the interior of the vacuum container than the radio-frequency antenna and configured to close the opening in a gas-tight manner. The radio-frequency antenna including a metal fiber sheet has a larger surface area and a lower impedance to a radio-frequency current than a radio-frequency antenna including a metal plate having the same outer shape. Therefore, it allows a radio-frequency current commonly used for plasma generation to be more efficiently passed through in large amounts.

公开(公告)号：US20140158277A1

公开(公告)日：2014-06-12

申请号：US14153702

申请日：2014-01-13

申请人： Tomoegawa Co., Ltd.

发明人： Hajime TSUDA ,  Katsumi MOTEGI

IPC分类号： B32B9/04

CPC分类号： B32B9/04 ,  B32B27/08 ,  B32B27/20 ,  C01B33/40 ,  Y10T156/10 ,  Y10T428/239 ,  Y10T428/249921 ,  Y10T428/26

摘要： A clay film composite which exhibits high gas barrier properties even under high humidity conditions is provided. The clay film composite having a clay film including a clay without or with an additive, and provided on at least one surface thereof, a water vapor barrier layer having a water permeability of 1.0 g/m2·day or less. The clay film preferably has a distance between clay particle layers of 1.3 nm or less. The clay film preferably has a water content of 3.0% by mass or less. It is preferable to melt-bond the water vapor barrier layer to the clay film.

摘要翻译： 提供即使在高湿度条件下也显示出高阻气性的粘土膜复合材料。 粘土膜复合体具有粘土膜，该粘土膜包括没有或具有添加剂的粘土，并且在其至少一个表面上设置透水性为1.0g / m 2·天以下的水蒸气阻隔层。 粘土膜的粘土颗粒层之间的距离优选为1.3nm以下。 粘土膜的水分含量优选为3.0质量％以下。 优选将水蒸气阻隔层熔融粘合到粘土膜。