Device for measuring the purity of ultrapure water
    1.
    发明授权
    Device for measuring the purity of ultrapure water 有权
    用于测量超纯水纯度的装置

    公开(公告)号:US08793076B2

    公开(公告)日:2014-07-29

    申请号:US13914880

    申请日:2013-06-11

    CPC classification number: G01N27/06 G01N33/1826 Y02A20/206

    Abstract: Disclosed is a method for analyzing the quantity of organic compounds existing in a liquid, such as ultrapure water, at the outlet from a purification device including in series a filter, an oxidizing device and a polishing device, and further including a resistivity measuring device for measuring the resitivity of water to determine the purity thereof. Only one resistivity measuring cell is used, and the outlet points of the filter and the oxidizing device are connected to the resistivity measuring cell by pipes provided with an analysis valve and/or check valves selectively enabling circulation of the liquid within them.

    Abstract translation: 本发明公开了一种分析在串联过滤器,氧化装置和研磨装置的净化装置的出口处存在于超纯水等液体中的有机化合物的量的方法,还包括电阻率测定装置, 测量水的溶解度以确定其纯度。 仅使用一个电阻率测量单元,并且通过配有分析阀和/或选择性地使液体在其内循环的止回阀的管道将过滤器和氧化装置的出口点连接到电阻率测量池。

    Device For Measuring The Purity Of Ultrapure Water
    2.
    发明申请
    Device For Measuring The Purity Of Ultrapure Water 有权
    超纯水测定装置

    公开(公告)号:US20130269425A1

    公开(公告)日:2013-10-17

    申请号:US13914880

    申请日:2013-06-11

    CPC classification number: G01N27/06 G01N33/1826 Y02A20/206

    Abstract: This is a device for analyzing the quantity of organic compounds existing in a liquid, such as ultrapure water, at the outlet from a purification device including in series filter means (1), oxidation means (2) and polishing means (3), further including means for measuring the resistivity of water to determine the purity thereof, characterized in that it includes only one resistivity measuring cell (4) and in that the outlet points of said filter means (1) and said oxidation means (2) are connected to said resistivity measuring cell (4) by pipes provided with an analysis valve (6) and/or check valves (5) selectively enabling circulation of said liquid within them.

    Abstract translation: 这是用于在包括串联过滤装置(1),氧化装置(2)和抛光装置(3)的净化装置的出口处分析存在于液体中的有机化合物如超纯水的量的装置, 包括用于测量水的电阻率以确定其纯度的装置,其特征在于,其仅包括一个电阻率测量单元(4),并且所述过滤装置(1)和所述氧化装置(2)的出口点连接到 所述电阻率测量单元(4)由设有分析阀(6)和/或止回阀(5)的管道选择性地使所述液体在其内循环。

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