公开(公告)号：US20230030188A1

公开(公告)日：2023-02-02

申请号：US17871249

申请日：2022-07-22

申请人： ENTEGRIS, INC.

发明人： Charles Miller ,  Alissa Wild

IPC分类号： H01L21/673 ,  G01N30/93 ,  G01N30/95

摘要： Adsorbents can be structured for use in a wafer container microenvironment. The loading of these adsorbents can be tailored to the particular contaminants to be removed from the wafer container microenvironment. The loading can include adsorbents for one or more contaminants, the contaminants including acids, bases, condensable organic compounds, and/or volatile organic compounds. The adsorbent can further include a moisture removal material such as a molecular sieve. The contaminants to be removed can be determined by cleaning or staging conditions for the wafer container, testing of previous adsorbents used in processes.